System, method and apparatus for self-cleaning dry etch
BAILEY, III ANDREW D, LOHOKARE SHRIKANT P, KIM YUNSANG, HOWALD ARTHUR M
Year of Publication 03.07.2012
Get full text
Year of Publication 03.07.2012
Patent
System, method and apparatus for self-cleaning dry etch
Bailey, III, Andrew D, Lohokare, Shrikant P, Howald, Arthur M, Kim, Yunsang
Year of Publication 03.07.2012
Get full text
Year of Publication 03.07.2012
Patent
METHOD AND APPARATUS FOR PRODUCING UNIFORM PROCESSING RATE
ANDRAS KUTHI, MARK HENRY WILLCOXSON, ANDREW D BAILEY III, ARTHUR M HOWALD
Year of Publication 31.05.2012
Get full text
Year of Publication 31.05.2012
Patent