by Arstila, K., Julin, J., Laitinen, M.I., Aalto, J., Konu, T., Kärkkäinen, S., Rahkonen, S., Raunio, M., Itkonen, J., Santanen, J.-P., Tuovinen, T., Sajavaara, T.
Published in Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms (15.07.2014)

by Xie, R, Zhang, C, van der Veen, M H, Arstila, K, Hantschel, T, Chen, B, Zhong, G, Robertson, J
Published in Nanotechnology (29.03.2013)

by Vandooren, A., Leonelli, D., Rooyackers, R., Arstila, K., Groeseneken, G., Huyghebaert, C.
Published in Solid-state electronics (01.06.2012)

by Napari, M, Tarvainen, O, Kinnunen, S, Arstila, K, Julin, J, Fjellvåg, Ø S, Weibye, K, Nilsen, O, Sajavaara, T
Published in Journal of physics. D, Applied physics (08.03.2017)

by Napari, M, Tarvainen, O, Kinnunen, S, Arstila, K, Julin, J, Fjellvåg, Ø S, Weibye, K, Nilsen, O, Sajavaara, T
Published in Journal of physics. D, Applied physics (06.02.2017)

by Barradas, N.P., Arstila, K., Battistig, G., Bianconi, M., Dytlewski, N., Jeynes, C., Kótai, E., Lulli, G., Mayer, M., Rauhala, E., Szilágyi, E., Thompson, M.
Published in Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms (01.09.2007)

by Vockenhuber, C., Arstila, K., Jensen, J., Julin, J., Kettunen, H., Laitinen, M., Rossi, M., Sajavaara, T., Thöni, M., Whitlow, H.J.
Published in Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms (15.01.2017)

by Barradas, N.P., Arstila, K., Battistig, G., Bianconi, M., Dytlewski, N., Jeynes, C., Kótai, E., Lulli, G., Mayer, M., Rauhala, E., Szilágyi, E., Thompson, M.
Published in Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms (01.04.2008)

by Aaltonen, T., Ritala, M., Arstila, K., Keinonen, J., Leskelä, M.
Published in Chemical vapor deposition (01.08.2004)

by Arstila, K., Hantschel, T., Schulze, A., Vandooren, A., Verhulst, A.S., Rooyackers, R., Eyben, P., Vandervorst, W.
Published in Microelectronic engineering (01.05.2013)

by Arstila, K
Published in Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms (01.08.2000)

by Niskanen, A., Hatanpää, T., Arstila, K., Leskelä, M., Ritala, M.
Published in Chemical vapor deposition (01.08.2007)

by Arstila, K, Sajavaara, T, Keinonen, J
Published in Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms (01.03.2001)

by Mayer, M., Arstila, K., Nordlund, K., Edelmann, E., Keinonen, J.
Published in Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms (01.08.2006)

by Niskanen, A., Arstila, K., Leskelä, M., Ritala, M.
Published in Chemical vapor deposition (01.04.2007)

by Hantschel, T., Schulze, A., Celano, U., Moussa, A., Arstila, K., Eyben, P., Majeed, B., Tezcan, D.S., Werner, T., Vandervorst, W.
Published in Microelectronic engineering (01.09.2012)

by Giangrandi, S., Arstila, K., Brijs, B., Sajavaara, T., Vantomme, A., Vandervorst, W.
Published in Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms (01.06.2009)

by Likonen, J., Vainonen-Ahlgren, E., Khriachtchev, L., Coad, J.P., Rubel, M., Renvall, T., Arstila, K., Hole, D.E.
Published in Journal of nuclear materials (15.07.2008)

by Kinnunen, S., Arstila, K., Sajavaara, T.
Published in Applied surface science (30.04.2021)

by Kinnunen, S., Arstila, K., Sajavaara, T.
Published in Applied surface science (01.04.2021)