Search Results - "ARNZ MICHAEL" :: K.UTB vyhledávací portál

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PROJECTION EXPOSURE APPARATUS WITH WAVEFRONT MEASURING DEVICE AND OPTICAL WAVEFRONT MANIPULATOR

by GRUNER TORALF, HARTJES JOACHIM, SCHWAB MARKUS, BLEIDISTEL SASCHA, ARNZ MICHAEL
Year of Publication 23.08.2017

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Method and device for determining the position of a first structure relative to a second structure or a part thereof

by ARNZ MICHAEL
Year of Publication 21.04.2015

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Patent

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METHOD AND APPARATUS FOR MEASURING SCATTERED LIGHT ON AN OPTICAL SYSTEM

by ARNZ, MICHAEL
Year of Publication 01.10.2014

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Patent

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Method and device for determining a lateral offset of a pattern on a substrate relative to a desired position

by Arnz Michael, Seidel Dirk
Year of Publication 10.10.2017

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Patent

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Method and device for determining the position of an edge of a marker structure with subpixel accuracy in an image, having a plurality of pixels, of the marker structure

by ARNZ MICHAEL
Year of Publication 04.06.2013

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Patent

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METHOD AND DEVICE FOR DETERMINING THE POSITION OF A FIRST STRUCTURE RELATIVE TO A SECOND STRUCTURE OR A PART THEREOF

by ARNZ MICHAEL
Year of Publication 13.12.2012

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Patent

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Measuring device for measuring an illumination property

by DEGUENTHER MARKUS, ARNZ MICHAEL
Year of Publication 28.06.2016

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Patent

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Method and apparatus for measuring scattered light on an optical system

by ARNZ MICHAEL
Year of Publication 10.07.2012

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Method and apparatus for measuring scattered light on an optical system

by Arnz, Michael
Year of Publication 10.07.2012

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Patent

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METHOD AND DEVICE FOR DETERMINING A LATERAL OFFSET OF A PATTERN ON A SUBSTRATE RELATIVE TO A DESIRED POSITION

by ARNZ MICHAEL, SEIDEL DIRK
Year of Publication 14.04.2016

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Patent

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Imaging device and imaging method for an imaging device

by Arnz, Michael, Seidel, Dirk, Perlitz, Sascha
Year of Publication 17.04.2019

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Patent

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Method for determining the registration of a structure on a photomask and apparatus to perform the method

by Klose, Gerd, Arnz, Michael, Seidel, Dirk
Year of Publication 30.10.2018

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Measuring Device for Measuring an Illumination Property

by DEGUENTHER MARKUS, ARNZ MICHAEL
Year of Publication 15.01.2015

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Patent

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Digital artery flaps for closure of soft tissue defects of the forefoot

by Dutch, William M., Arnz, Michael, Jolly, Gary Peter
Published in The Journal of foot and ankle surgery (01.07.2003)

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Journal Article

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METHOD AND DEVICE FOR DETERMINING THE POSITION OF AN EDGE OF A MARKER STRUCTURE WITH SUBPIXEL ACCURACY IN AN IMAGE, HAVING A PLURALITY OF PIXELS, OF THE MARKER STRUCTURE

by ARNZ MICHAEL
Year of Publication 07.10.2010

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Patent

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METHOD AND APPARATUS FOR MEASURING SCATTERED LIGHT ON AN OPTICAL SYSTEM

by ARNZ MICHAEL
Year of Publication 19.08.2010

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Patent

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METHOD AND APPARATUS FOR MEASURING SCATTERED LIGHT ON AN OPTICAL SYSTEM

by ARNZ, MICHAEL
Year of Publication 28.04.2010

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Patent

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Determination of the relative position of two structures

by ARNZ MICHAEL, SEIDEL DIRK
Year of Publication 08.04.2014

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Patent

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Method and apparatus for the position determination of structures on a mask for microlithography

by ARNZ MICHAEL, SEIDEL DIRK
Year of Publication 08.04.2014

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Patent

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Test object for measuring the point spread function of an optical system

by Arnz Michael, Stoppe Lars, Pomraenke Robert
Year of Publication 24.10.2017

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Patent

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