Monitoring dimensions of features at different locations in the processing of substrates
SHAN, HONGQING, HANSON, NEIL E, MAYDAN, DAN, SINHA, ASHOK K, ARMACOST, MICHAEL D, MA, DIANA XIAOBING, HOLLAND, JOHN, PU, BRYAN Y, SUI, ZHIFENG, JAIN, MOHIT, MICHAEL, BARNES
Year of Publication 21.07.2011
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Year of Publication 21.07.2011
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Method for critical dimension shrink using conformal PECVD films
LI, SIYI, MCCLINTOCK, WILLIAM H, XIA, LI-QUN, SHEK, MEIYEE, ARMACOST, MICHAEL D, BALSEANU, MIHAELA, CUI, ZHEN-JIANG, NAIK, MEHUL B
Year of Publication 16.02.2010
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Year of Publication 16.02.2010
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Process for selective deposition of a polymer coating
NGUYEN, SON V, GRUNDON, STEVEN A, ARMACOST, MICHAEL D, HARMON, DAVID L, REMBETSKI, JOHN F
Year of Publication 07.10.1992
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Year of Publication 07.10.1992
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Apparatus and method for low-k dielectric repair
LILL, THORSTEN B, SUN, HUI, BALAKRISHNA, AJIT, COLLINS, KENNETH S, ARMACOST, MICHAEL D, YIEH, ELLIE Y, CARDUCCI, JAMES D, GOLD, EZRA R, TANG, HAI-RONG, ZHANG, CHUN-LEI, MARKOVSKY, IGOR, KAYA, IWALANI S, NEMANI, SRINIVAS D
Year of Publication 16.05.2011
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Year of Publication 16.05.2011
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ANISOTROPIC ETCHING METHOD
MALINOWSKI JOHN C, NG HUNG Y, DOBUZINSKY DAVID M, YU CHIENFAN, WISE RICHARD S, ARMACOST MICHAEL D
Year of Publication 24.09.1999
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Year of Publication 24.09.1999
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Process for anisotropic etching of nitride layer with selectivity to oxide
YU, CHIENFAN, WISE, RICHARD S, NG, HUNG Y, MALINOWSKI, JOHN C, ARMACOST, MICHAEL D, DOBUZINSKY, DAVID M
Year of Publication 04.08.1999
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Year of Publication 04.08.1999
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METHOD OF ETCHING SILICON OXIDE SILICON LAYER
DOBUZINSKY DAVID M, PASSOW MICHAEL L, WILLE WILLIAM C, COTLER-WAGNER TINA J, DELLAGUARDIA RONALD A, ARMACOST MICHAEL D, CONLEY WILLARD E
Year of Publication 09.07.1999
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Year of Publication 09.07.1999
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Dielectric materials to prevent photoresist poisoning
DIXIT, GIRISH A, ARMACOST, MICHAEL D, YIEH, ELLIE Y, NAIK, MEHUL, NGUYEN, SON VAN
Year of Publication 01.03.2005
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Year of Publication 01.03.2005
Patent
Monitoring dimensions of features at different locations in the processing of substrate
SHAN, HONGQING, HANSON, NEIL E, MAYDAN, DAN, SINHA, ASHOK K, ARMACOST, MICHAEL D, MA, DIANA XIAOBING, HOLLAND, JOHN, PU, BRYAN Y, SUI, ZHIFENG, JAIN, MOHIT, MICHAEL, BARNES
Year of Publication 01.03.2005
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Year of Publication 01.03.2005
Patent