Method and system for balancing the electrostatic chucking force on a substrate
Liu, Mingte, Jing, Lei, Jiang, Chong, Armacost, Michael D, Zhang, Pallavi, Allen, Adolph Miller, Johnson, Michael W
Year of Publication 21.01.2020
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Year of Publication 21.01.2020
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Process kit erosion and service life prediction
Chiang, Kang-Lie, Khurana, Nitin, Blackburn, Greg A, Armacost, Michael D, Zhang, Pallavi
Year of Publication 08.01.2019
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Year of Publication 08.01.2019
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PROCESS KIT EROSION AND SERVICE LIFE PREDICTION
ZHANG Pallavi, CHIANG Kang-Lie, ARMACOST Michael D, BLACKBURN Greg A, KHURANA Nitin
Year of Publication 15.02.2018
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Year of Publication 15.02.2018
Patent
METHOD AND SYSTEM FOR BALANCING THE ELECTROSTATIC CHUCKING FORCE ON A SUBSTRATE
ARMACOST, Michael D, JING, Lei, LIU, Mingte, JOHNSON, Michael W, JIANG, Chong, ALLEN, Adolph Miller, ZHANG, Pallavi
Year of Publication 15.11.2018
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Year of Publication 15.11.2018
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Reliability improvement of Cu/low-k interconnects by integrating novel single pass single wafer wet clean
Chang, R., Jianshe Tang, Verhaverbeke, S., Smekalin, K., Lee, J.T.C., Armacost, M.D.
Published in ISSM 2005, IEEE International Symposium on Semiconductor Manufacturing, 2005 (2005)
Published in ISSM 2005, IEEE International Symposium on Semiconductor Manufacturing, 2005 (2005)
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Conference Proceeding
Method for fabricating interconnect structures for semiconductor devices
Patz, Ryan James, Peidous, Igor, Pender, Jeremiah, Armacost, Michael D
Year of Publication 27.03.2012
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Year of Publication 27.03.2012
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ROTATIONAL ABSORPTION SPECTRA FOR SEMICONDUCTOR MANUFACTURING PROCESS MONITORING AND CONTROL
LIAN, LEI, STOUT, PHILLIP, ARMACOST, MICHAEL D, PATZ, RYAN, SUI, ZHIFENG
Year of Publication 21.11.2013
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Year of Publication 21.11.2013
Patent
METHODS FOR ETCHING SILICON-BASED ANTIREFLECTIVE LAYERS
PENDER, JEREMIAH T, ZHOU, QINGJUN, ZHOU, YIFENG, ARMACOST, MICHAEL D, PATZ, RYAN
Year of Publication 26.04.2012
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Year of Publication 26.04.2012
Patent
METHODS FOR ETCHING SILICON-BASED ANTIREFLECTIVE LAYERS
PENDER, JEREMIAH T, ZHOU, QINGJUN, ZHOU, YIFENG, ARMACOST, MICHAEL D, PATZ, RYAN
Year of Publication 27.10.2011
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Year of Publication 27.10.2011
Patent
METHODS FOR ETCHING SILICON-BASED ANTIREFLECTIVE LAYERS
ZHOU YIFENG, PENDER JEREMIAH T, ZHOU QINGJUN, ARMACOST MICHAEL D, PATZ RYAN
Year of Publication 20.10.2011
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Year of Publication 20.10.2011
Patent
Rotational absorption spectra for semiconductor manufacturing process monitoring and control
LIAN, LEI, STOUT, PHILLIP, ARMACOST, MICHAEL D, PATZ, RYAN, SUI, ZHIFENG
Year of Publication 01.08.2017
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Year of Publication 01.08.2017
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