Photoluminescence and Raman Spectral Study of Porous Si during F 2 Exposure
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Published in Japanese Journal of Applied Physics (15.03.1997)
Published in Japanese Journal of Applied Physics (15.03.1997)
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Journal Article
SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF
OKUYAMA YUTAKA, HISAMOTO DIGH, ARIGANE TSUYOSHI, OKADA DAISUKE, HASHIMOTO TAKASHI
Year of Publication 17.01.2014
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Year of Publication 17.01.2014
Patent