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Method for producing gate stack sidewall spacers
by
ARGHAVANI REZA
,
KWAN MICHAEL C
.,
XIA LI
-
QUN
,
YIM KANG S
Year of Publication
23.08.2006
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Patent
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chemistry
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medicine
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basic electric elements
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chemical surface treatment
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chemistry
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coating material with metallic material
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coating metallic material
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diffusion treatment of metallic material
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English
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esp@cenet
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