Thermal oxidation temperature dependence of 4H-SiC MOS interface
Kurimoto, Hirofumi, Shibata, Kaoru, Kimura, Chiharu, Aoki, Hidemitsu, Sugino, Takashi
Published in Applied surface science (30.12.2006)
Published in Applied surface science (30.12.2006)
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Journal Article
Atomic bonds in boron carbon nitride films synthesized by remote plasma-assisted chemical vapor deposition
Kimura, Chiharu, Sota, Hiroshi, Aoki, Hidemitsu, Sugino, Takashi
Published in Diamond and related materials (01.02.2009)
Published in Diamond and related materials (01.02.2009)
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Journal Article
Conference Proceeding
Annealing effect on photoluminescence of Tb-doped AlBON films
Masumoto, Keiko, Kimura, Chiharu, Aoki, Hidemitsu, Sugino, Takashi
Published in Solid state communications (01.08.2010)
Published in Solid state communications (01.08.2010)
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Journal Article
Effect of the radio-frequency power on the dielectric properties of hydrogen-containing boron carbon nitride films deposited by plasma-assisted chemical vapor deposition using tris(dimethylamino)boron gas
Aoki, Hidemitsu, Masuzumi, Takuro, Hara, Makoto, Watanabe, Daisuke, Kimura, Chiharu, Sugino, Takashi
Published in Thin solid films (01.02.2010)
Published in Thin solid films (01.02.2010)
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Journal Article
Characterization of boron carbon nitride film for humidity sensor
Aoki, Hidemitsu, Shima, Hidekazu, Kimura, Chiharu, Sugino, Takashi
Published in Diamond and related materials (01.04.2007)
Published in Diamond and related materials (01.04.2007)
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Journal Article
Conference Proceeding
Influence of moisture on BCN (low- K) film for interconnection reliability
Aoki, Hidemitsu, Watanabe, Daisuke, Moriyama, Ryota, Mazumder, M.K., Komatsu, Naoyoshi, Kimura, Chiharu, Sugino, Takashi
Published in Diamond and related materials (01.04.2008)
Published in Diamond and related materials (01.04.2008)
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Journal Article
Conference Proceeding
Effect of nitrogen doping on the properties of AlSiO film for wide bandgap semiconductors
Komatsu, Naoyoshi, Tanaka, Hirotaka, Aoki, Hidemitsu, Masumoto, Keiko, Honjo, Masatomo, Kimura, Chiharu, Okumura, Yukihiko, Sugino, Takashi
Published in Applied surface science (15.12.2010)
Published in Applied surface science (15.12.2010)
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Journal Article
Influences of Intensity of Electric Field on Properties of Poly(vinylidene fluoride--tetrafluoroethylene) Thin Films during Annealing Process
Jeong, Jong-Hyeon, Terashima, Daiki, Kimura, Chiharu, Aoki, Hidemitsu
Published in Japanese Journal of Applied Physics (01.04.2011)
Published in Japanese Journal of Applied Physics (01.04.2011)
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Journal Article
Luminescence Characteristics and Annealing Effect of Tb-Doped AlBNO Films for Inorganic Electroluminescence Devices
Masumoto, Keiko, Semba, Akitoshi, Kimura, Chiharu, Taniguchi, Takashi, Watanabe, Kenji, Sakata, Takao, Aoki, Hidemitsu
Published in Japanese Journal of Applied Physics (01.04.2011)
Published in Japanese Journal of Applied Physics (01.04.2011)
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Journal Article
Influences of Intensity of Electric Field on Properties of Poly(vinylidene fluoride–tetrafluoroethylene) Thin Films during Annealing Process
Jeong, Jong-Hyeon, Terashima, Daiki, Kimura, Chiharu, Aoki, Hidemitsu
Published in Japanese Journal of Applied Physics (01.04.2011)
Published in Japanese Journal of Applied Physics (01.04.2011)
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Journal Article
Effect of plasma treatment on interface property of BCN/GaN structure
Shimada, Yoshiaki, Chikamatsu, Kentaro, Kimura, Chiharu, Aoki, Hidemitsu, Sugino, Takashi
Published in Applied surface science (30.11.2006)
Published in Applied surface science (30.11.2006)
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Journal Article
Dry Etching of Al-Rich AlGaAs for Photonic Crystal Fabrication
Mochizuki, Masaya, Kitabayashi, Yuta, Nakajima, Tomoya, Satoi, Daiki, Ishikawa, Fumitaro, Kondow, Masahiko, Hara, Makoto, Kimura, Chiharu, Aoki, Hidemitsu, Sugino, Takashi
Published in Japanese Journal of Applied Physics (01.04.2011)
Published in Japanese Journal of Applied Physics (01.04.2011)
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Journal Article
Characterization of boron carbon nitride film modified by excimer laser annealing
Aoki, Hidemitsu, Ohyama, Kazutoshi, Sota, Hiroshi, Seino, Toshiaki, Kimura, Chiharu, Sugino, Takashi
Published in Applied surface science (15.11.2007)
Published in Applied surface science (15.11.2007)
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Journal Article