Novel porous films having low dielectric constants synthesized by liquid phase silylation of spin-on glass sol for intermetal dielectrics
Get full text
Conference Proceeding
Journal Article
Low Dielectric Constant Film Containing No Oxygen for Barrier-Free Cu Interconnects
Fukuda, Takuya, Aoi, Nobuo, Funaki, Yoshinori
Published in Japanese Journal of Applied Physics (01.03.2007)
Published in Japanese Journal of Applied Physics (01.03.2007)
Get full text
Journal Article
Novel Method of Estimating Dielectric Constant for Low-k Materials
Fukuda, Takuya, Aoi, Nobuo, Matsunaga, Hironori
Published in Japanese Journal of Applied Physics (15.03.2002)
Published in Japanese Journal of Applied Physics (15.03.2002)
Get full text
Journal Article