Metal Etch Depth Metrology using YieldStar and CDSEM
Anunciado, Roy, Aliaj, Ilirjan, Van Haren, Richard, Truffert, Vincent, Moussa, Alain, Goossens, Danny, Tamaddon, Amir-Hossein
Published in 2024 35th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (13.05.2024)
Published in 2024 35th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (13.05.2024)
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Conference Proceeding
리소그래피 공정을 모니터링하는 방법
ANUNCIADO ROY, DILLEN HERMANUS ADRIANUS, VAN LAARHOVEN HENDRIK ADRIAAN, VERMA ALOK, VAN DER SANDEN STEFAN CORNELIS THEODORUS
Year of Publication 17.08.2023
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Year of Publication 17.08.2023
Patent
Vibrationally resolved lifetimes of the 2 1 Σ u + state of Na 2
Anunciado, Roy B, Ashman, Seth, Hüwel, Lutz
Published in The Journal of chemical physics (07.11.2016)
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Published in The Journal of chemical physics (07.11.2016)
Journal Article
SEPARATION OF CONTRIBUTIONS TO METROLOGY DATA
ANUNCIADO ROY, THEEUWES THOMAS, MASLOW MARK JOHN, HINNEN PAUL CHRISTIAAN, STAALS FRANK, CRAMER HUGO AUGUSTINUS JOSEPH, JOSEN MARINUS, TEL WIM TJIBBO
Year of Publication 20.01.2022
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Year of Publication 20.01.2022
Patent
SEPARATION OF CONTRIBUTIONS TO METROLOGY DATA
ANUNCIADO ROY, THEEUWES THOMAS, MASLOW MARK JOHN, HINNEN PAUL CHRISTIAAN, STAALS FRANK, CRAMER HUGO AUGUSTINUS JOSEPH, JOSEN MARINUS, TEL WIM TJIBBO
Year of Publication 21.06.2021
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Year of Publication 21.06.2021
Patent
디바이스 제조 공정의 제어 파라미터들을 결정하는 방법
VAN INGEN SCHENAU KOENRAAD, ANUNCIADO ROY, VAN GORP SIMON HENDRIK CELINE, MASLOW MARK JOHN, STAALS FRANK, WARNAAR PATRICK, JOSEN MARINUS, TEL WIM TJIBBO, SLACHTER ABRAHAM
Year of Publication 22.06.2020
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Year of Publication 22.06.2020
Patent
계측 데이터에 대한 기여도들의 분리
ANUNCIADO ROY, THEEUWES THOMAS, MASLOW MARK JOHN, HINNEN PAUL CHRISTIAAN, STAALS FRANK, CRAMER HUGO AUGUSTINUS JOSEPH, JOSEN MARINUS, TEL WIM TJIBBO
Year of Publication 22.10.2018
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Year of Publication 22.10.2018
Patent
METHOD FOR CONFIGURING A FIELD OF VIEW OF AN INSPECTION APPARATUS
ANUNCIADO, Roy, NECHAEV, Konstantin, VAN DER SANDEN, Stefan, BASTANI, Vahid
Year of Publication 07.03.2024
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Year of Publication 07.03.2024
Patent