Search Results - "ANJUR, Sriram" :: K.UTB vyhledávací portál | TBU Library Retrieval Portal

Investigating Effect of Conditioner Aggressiveness on Removal Rate during Interlayer Dielectric Chemical Mechanical Planarization through Confocal Microscopy and Dual Emission Ultraviolet-Enhanced Fluorescence Imaging

Investigating Effect of Conditioner Aggressiveness on Removal Rate during Interlayer Dielectric Chemical Mechanical Planarization through Confocal Microscopy and Dual Emission Ultraviolet-Enhanced Fluorescence Imaging

by Sun, Ting, Borucki, Len, Zhuang, Yun, Sampurno, Yasa, Sudargho, Fransisca, Wei, Xiaomin, Anjur, Sriram, Philipossian, Ara
Published in Japanese Journal of Applied Physics (01.02.2010)

Get full text

Journal Article

Analysis of Large Particle Count in Fumed Silica Slurries and Its Correlation with Scratch Defects Generated by CMP

Analysis of Large Particle Count in Fumed Silica Slurries and Its Correlation with Scratch Defects Generated by CMP

by Remsen, Edward E., Anjur, Sriram, Boldridge, David, Kamiti, Mungai, Li, Shoutian, Johns, Timothy, Dowell, Charles, Kasthurirangan, Jaishankar, Feeney, Paul
Published in Journal of the Electrochemical Society (2006)

Get full text

Journal Article

POLISHING COMPOSITION AND METHOD UTILIZING ABRASIVE PARTICLES TREATED WITH AN AMINOSILANE

POLISHING COMPOSITION AND METHOD UTILIZING ABRASIVE PARTICLES TREATED WITH AN AMINOSILANE

by WARD WILLIAM, GRUMBINE STEVEN, WHITE DANIELA, DYSARD JEFFREY, ANJUR SRIRAM
Year of Publication 01.07.2010

Get full text

Patent

POLISHING COMPOSITION AND METHOD UTILIZING ABRASIVE PARTICLES TREATED WITH AN AMINOSILANE

POLISHING COMPOSITION AND METHOD UTILIZING ABRASIVE PARTICLES TREATED WITH AN AMINOSILANE

by WHITE, Daniela, GRUMBINE, Steven, DYSARD, Jeffrey, WARD, William, ANJUR, Sriram
Year of Publication 01.04.2020

Get full text

Patent

COMPOSITIONS AND METHODS FOR CMP OF PHASE CHANGE ALLOYS

COMPOSITIONS AND METHODS FOR CMP OF PHASE CHANGE ALLOYS

by DYSARD, Jeffrey, FEENEY, Paul, ANJUR, Sriram
Year of Publication 10.01.2018

Get full text

Patent

COMPOSITIONS AND METHODS FOR POLISHING SILICON NITRIDE MATERIALS

COMPOSITIONS AND METHODS FOR POLISHING SILICON NITRIDE MATERIALS

by CHEN, Zhan, DYSARD, Jeffrey, ANJUR, Sriram, JOHNS, Timothy
Year of Publication 13.09.2017

Get full text

Patent

POLISHING COMPOSITION CONTAINING POLYETHER AMINE

POLISHING COMPOSITION CONTAINING POLYETHER AMINE

by DYSARD, Jeffrey, WANG, Li, FEENEY, Paul, XIN, Yun-Biao, ANJUR, Sriram, JOHNS, Timothy
Year of Publication 15.05.2019

Get full text

Patent

COMPOSITIONS FOR CMP OF PHASE CHANGE ALLOYS

COMPOSITIONS FOR CMP OF PHASE CHANGE ALLOYS

by SRIRAM ANJUR, JEFFREY DYSARD, PAUL FEENEY
Year of Publication 17.10.2013

Get full text

Patent

COMPOSITIONS AND METHODS FOR CMP OF PHASE CHANGE ALLOYS

COMPOSITIONS AND METHODS FOR CMP OF PHASE CHANGE ALLOYS

by ANJUR, SRIRAM, DYSARD, JEFFREY, FEENEY, PAUL
Year of Publication 15.02.2013

Get full text

Patent

POLISHING COMPOSITION CONTAINING POLYETHER AMINE

POLISHING COMPOSITION CONTAINING POLYETHER AMINE

by SRIRAM ANJUR, WANG LI, TIMOTHY JOHNS, JEFFREY DYSARD, PAUL FEENEY, XIN YUN-BIAO
Year of Publication 31.03.2017

Get full text

Patent

Compositions and methods for polishing silicon nitride materials

Compositions and methods for polishing silicon nitride materials

by CHEN ZHAN, JOHNS TIMOTHY, DYSARD JEFFREY, ANJUR SRIRAM
Year of Publication 24.06.2014

Get full text

Patent

COMPOSITIONS AND METHODS FOR POLISHING SILICON NITRIDE MATERIALS

COMPOSITIONS AND METHODS FOR POLISHING SILICON NITRIDE MATERIALS

by JOHNS, TIMOTHY, ANJUR, SRIRAM, DYSARD, JEFFREY, CHEN, ZHAN
Year of Publication 14.03.2014

Get full text

Patent

ELECTROCHEMICAL-MECHANICAL POLISHING SYSTEM

ELECTROCHEMICAL-MECHANICAL POLISHING SYSTEM

by WYLIE, IAN, ANJUR, SRIRAM
Year of Publication 02.03.2006

Get full text

Patent

ELECTROCHEMICAL-MECHANICAL POLISHING SYSTEM

ELECTROCHEMICAL-MECHANICAL POLISHING SYSTEM

by WYLIE, IAN, ANJUR, SRIRAM
Year of Publication 29.12.2005

Get full text

Patent

Compositions and methods for CMP of phase change alloys

Compositions and methods for CMP of phase change alloys

by DYSARD JEFFREY, ANJUR SRIRAM, FEENEY PAUL
Year of Publication 01.03.2011

Get full text

Patent

Compositions and methods for CMP of phase change alloys

Compositions and methods for CMP of phase change alloys

by Dysard, Jeffrey, Feeney, Paul, Anjur, Sriram
Year of Publication 01.03.2011

Get full text

Patent

POLISHING COMPOSITION AND METHOD UTILIZING ABRASIVE PARTICLES TREATED WITH AN AMINOSILANE

POLISHING COMPOSITION AND METHOD UTILIZING ABRASIVE PARTICLES TREATED WITH AN AMINOSILANE

by WARD, WILLIAM, ANJUR, SRIRAM, GRUMBINE, STEVEN, WHITE, DANIELA, DYSARD, JEFFREY
Year of Publication 15.01.2013

Get full text

Patent

COMPOSITIONS AND METHODS FOR POLISHING SILICON NITRIDE MATERIALS

COMPOSITIONS AND METHODS FOR POLISHING SILICON NITRIDE MATERIALS

by JOHNS, TIMOTHY, ANJUR, SRIRAM, DYSARD, JEFFREY, CHEN, ZHAN
Year of Publication 21.12.2011

Get full text

Patent

COMPOSITIONS AND METHODS FOR CMP OF PHASE CHANGE ALLOYS

COMPOSITIONS AND METHODS FOR CMP OF PHASE CHANGE ALLOYS

by ANJUR, SRIRAM, DYSARD, JEFFREY, FEENEY, PAUL
Year of Publication 29.04.2009

Get full text

Patent

Polishing composition and method utilizing abrasive particles treated with an aminosilane

Polishing composition and method utilizing abrasive particles treated with an aminosilane

by WARD WILLIAM, GRUMBINE STEVEN, WHITE DANIELA, DYSARD JEFFREY, ANJUR SRIRAM
Year of Publication 09.08.2011

Get full text

Patent

1
2
3
4
5
6
7
8
9
10
11
Next
[12]