METHODS OF CONTROLLING EUV EXPOSURE DOSE, EUV LITHOGRAPHIC METHODS AND APPARATUS USING SUCH METHODS
IVANOV VLADIMIR VITALEVITCH, HERMANUS JOHANNES MARIA KREUWEL, VAN SCHOOT JAN BERNARD PLECHELMUS, VAN GREEVENBROEK HENDRIKUS ROBERTUS MARIE, YAKUNIN ANDREY MIKHAILOVICH
Year of Publication 22.04.2013
Get full text
Year of Publication 22.04.2013
Patent
LITHOGRAPHY APPARATUS AND DEVICE MANUFACTURING METHOD
SCACCABAROZZI LUIGI, IVANOV VLADIMIR VITALEVITCH, BANINE VADIM YEVGENYEVICH, YAKUNIN ANDREY MIKHAILOVICH
Year of Publication 30.06.2011
Get full text
Year of Publication 30.06.2011
Patent
RADIATION SOURCE APPARATUS, LITHOGRAPHIC APPARATUS, METHOD OF GENERATING AND DELIVERING RADIATION AND METHOD FOR MANUFACTURING DEVICE
LOOPSTRA ERIK ROELOF, SCACCABAROZZI LUIGI, BANINE VADIM YEVGENYEVICH, VAN DIJK ADRIANUS JOHANNES MARIA, STEINHOFF JENS ARNO, BRULS RICHARD JOSEPH, HENDRIK ANTONY JOHANNES NEERHOF, YAKUNIN ANDREY MIKHAILOVICH
Year of Publication 29.09.2011
Get full text
Year of Publication 29.09.2011
Patent
Optical element, lithographic apparatus including such an optical element, device manufacturing method, and device manufactured thereby
SOER, WOUTER ANTHON, BANINE, VADIM YEVGENYEVICH, YAKUNIN, ANDREY MIKHAILOVICH, VAN HERPEN, MAARTEN MARINUS JOHANNES WILHELMUS, MOORS, JOHANNES HUBERTUS JOSEPHINA
Year of Publication 01.06.2016
Get full text
Year of Publication 01.06.2016
Patent
Optical element, lithographic apparatus including such an optical element, device manufacturing method, and device manufactured thereby
JOHANNES HUBERTUS JOSEPHINA MOORS, MAARTEN MARINUS JOHANNES WILHELMUS VAN HERPEN, ANDREY MIKHAILOVICH YAKUNIN, WOUTER ANTHON SOER, VADIM YEVGENYEVICH BANINE
Year of Publication 31.08.2009
Get full text
Year of Publication 31.08.2009
Patent
SPECTRAL PURITY FILTER, LITHOGRAPHIC APPARATUS, AND METHOD FOR MANUFACTURING A SPECTRAL PURITY FILTER
SOER WOUTER ANTHON, BANINE VADIM YEVGENYEVICH, JAK MARTIN JACOBUS JOHAN, GLUSHKOV DENIS ALEXANDROVICH, WILHELMUS VAN HERPEN MAARTEN MARINUS JOHANNES, YAKUNIN ANDREY MIKHAILOVICH
Year of Publication 20.01.2011
Get full text
Year of Publication 20.01.2011
Patent
Optical element, lithographic apparatus including such an optical element, device manufacturing method, and device manufactured thereby
SOER, WOUTER ANTHON, BANINE, VADIM YEVGENYEVICH, YAKUNIN, ANDREY MIKHAILOVICH, VAN HERPEN, MAARTEN MARINUS JOHANNES WILHELMUS, MOORS, JOHANNES HUBERTUS JOSEPHINA
Year of Publication 01.08.2015
Get full text
Year of Publication 01.08.2015
Patent
Optical element, lithographic apparatus including such an optical element, device manufacturing method, and device manufactured thereby
SOER, WOUTER ANTHON, BANINE, VADIM YEVGENYEVICH, YAKUNIN, ANDREY MIKHAILOVICH, VAN HERPEN, MAARTEN MARINUS JOHANNES WILHELMUS, MOORS, JOHANNES HUBERTUS JOSEPHINA
Year of Publication 01.05.2015
Get full text
Year of Publication 01.05.2015
Patent