Method to resolve hollow metal defects in interconnects
FILIPPI RONALD G, SIMON ANDREW H, CHOI SAMUEL S, BAO JUNJING, LUSTIG NAFTALI E, BONILLA GRISELDA
Year of Publication 19.05.2015
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Year of Publication 19.05.2015
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Stacked via structure for metal fuse applications
FILIPPI RONALD G, SIMON ANDREW H, WANG PINGUAN, LUSTIG NAFTALI E, BONILLA GRISELDA, GRUNOW STEPHAN, CHANDA KAUSHIK
Year of Publication 07.06.2016
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Year of Publication 07.06.2016
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Back-end electrically programmable fuse
Moy Dan, Bonilla Griselda, Choi Samuel S, Filippi Ronald, Lustig Naftali E, Bao Junjing, Simon Andrew H, Grunow Stephan, Chanda Kaushik
Year of Publication 20.06.2017
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Year of Publication 20.06.2017
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INTERCONNECT STRUCTURE WITH ENHANCED RELIABILITY
FILIPPI RONALD G, SIMON ANDREW H, EDWARDS ROBERT D, WANG PINGUAN, BONILLA GRISELDA, CHANDA KAUSHIK
Year of Publication 26.02.2015
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Year of Publication 26.02.2015
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VERFAHREN FÜR EINE ELEKTRISCHE ERKENNUNG EINER SCHÄDIGUNG EINER GESTAPELTEN DURCHKONTAKTSTRUKTUR FÜR METALLSICHERUNGSANWENDUNGEN
Grunow, Stephan, Simon, Andrew H, Filippi, Ronald G, Lustig, Naftali E, Chanda, Kaushik, Bonilla, Griselda, Wang, Ping-Chuan
Year of Publication 22.04.2021
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Year of Publication 22.04.2021
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MODIFIED VIA BOTTOM FOR BEOL VIA EFUSE
FILIPPI RONALD G, SIMON ANDREW H, CHOI SAMUEL S, BAO JUNJING, LUSTIG NAFTALI E, BONILLA GRISELDA
Year of Publication 05.02.2015
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Year of Publication 05.02.2015
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Modified via bottom for BEOL via efuse
FILIPPI RONALD G, SIMON ANDREW H, CHOI SAMUEL S, BAO JUNJING, LUSTIG NAFTALI E, BONILLA GRISELDA
Year of Publication 30.12.2014
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Year of Publication 30.12.2014
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Interconnect structure with enhanced reliability
SIMON ANDREW H, EDWARDS ROBERT D, WANG PINGUAN, BONILLA GRISELDA, FILIPPI RONALD, CHANDA KAUSHIK
Year of Publication 16.12.2014
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Year of Publication 16.12.2014
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Gestapelte Durchkontaktstruktur für Metallsicherungsanwendungen
Grunow, Stephan, Simon, Andrew H, Filippi, Ronald G, Lustig, Naftali E, Chanda, Kaushik, Bonilla, Griselda, Wang, Ping-Chuan
Year of Publication 11.02.2021
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Year of Publication 11.02.2021
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E-FUSE WITH HYBRID METALLIZATION
FILIPPI RONALD G, SIMON ANDREW H, CHOI SAMUEL S, BAO JUNJING, LUSTIG NAFTALI E, BONILLA GRISELDA
Year of Publication 13.11.2014
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Year of Publication 13.11.2014
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High Performance Refractory Metal / Copper Interconnects To Eliminate Electromigration
FILIPPI RONALD G, SIMON ANDREW H, CHOI SAMUEL S, BAO JUNJING, LUSTIG NAFTALI E, BONILLA GRISELDA
Year of Publication 13.11.2014
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Year of Publication 13.11.2014
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Hybrid Graphene-Metal Interconnect Structures
FILIPPI RONALD G, SIMON ANDREW H, CHOI SAMUEL S, BAO JUNJING, LUSTIG NAFTALI E, BONILLA GRISELDA
Year of Publication 30.10.2014
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Year of Publication 30.10.2014
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Method of making a copper interconnect having a barrier liner of multiple metal layers
NOGAMI TAKESHI, SIMON ANDREW H, WYNNE JEAN E, SHAW THOMAS M, YANG CHIHAO
Year of Publication 23.09.2014
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Year of Publication 23.09.2014
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E-fuse structures and methods of manufacture
FILIPPI RONALD G, SIMON ANDREW H, CHOI SAMUEL S, LUSTIG NAFTALI E, BONILLA GRISELDA, GRUNOW STEPHAN, CHANDA KAUSHIK
Year of Publication 22.09.2015
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Year of Publication 22.09.2015
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DOPING OF COPPER WIRING STRUCTURES IN BACK END OF LINE PROCESSING
KO TZE-MAN, SIMON ANDREW H, TSENG WEI-TSU, DYER THOMAS W, EDELSTEIN DANIEL C
Year of Publication 10.09.2015
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Year of Publication 10.09.2015
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REDUNDANT VIA STRUCTURE FOR METAL FUSE APPLICATIONS
FILIPPI RONALD G, SIMON ANDREW H, CHOI SAMUEL S, LUSTIG NAFTALI E, BONILLA GRISELDA, GRUNOW STEPHAN, CHANDA KAUSHIK
Year of Publication 20.08.2015
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Year of Publication 20.08.2015
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Copper interconnect with CVD liner and metallic cap
BOLOM TIBOR, HU CHAO-KUN, NIU CHENGYU, SIMON ANDREW H, BAUMANN FRIEDER H, MOTOYAMA KOICHI
Year of Publication 18.08.2015
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Year of Publication 18.08.2015
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MODIFIED VIA BOTTOM FOR BEOL VIA EFUSE
FILIPPI RONALD G, SIMON ANDREW H, CHOI SAMUEL S, BAO JUNJING, LUSTIG NAFTALI E, BONILLA GRISELDA
Year of Publication 03.07.2014
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Year of Publication 03.07.2014
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Electronic fuse vias in interconnect structures
FILIPPI RONALD G, SIMON ANDREW H, CHOI SAMUEL S, BAO JUNJING, LUSTIG NAFTALI ELIAHU, EDELSTEIN DANIEL C, BONILLA GRISELDA
Year of Publication 04.08.2015
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Year of Publication 04.08.2015
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