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Year of Publication 21.02.2008
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Year of Publication 11.06.2009
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Sacrificial metal liner for copper interconnects
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Year of Publication 08.03.2006
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Year of Publication 06.03.2012
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Year of Publication 06.03.2012
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Year of Publication 11.01.2006
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Year of Publication 11.01.2006
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METHOD AND APPARATUS FOR FORMING A METAL LAYER
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Year of Publication 03.11.2005
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Year of Publication 03.11.2005
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SACRIFICIAL METAL LINER FOR COPPER INTERCONNECTS
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Year of Publication 21.10.2005
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Year of Publication 21.10.2005
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Year of Publication 06.10.2005
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Year of Publication 06.10.2005
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Ti liner for copper interconnect with low-k dielectric
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Year of Publication 01.09.2005
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Year of Publication 01.09.2005
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