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Year of Publication 17.03.2011
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Year of Publication 17.03.2011
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REFLECTIVE OPTICAL ELEMENT FOR USE IN AN EUV SYSTEM
LE MAIRE MICHEL, KIEREY HOLGER, LENGEL ANTON, ANDERL WILLI, HOLDERER HUBERT
Year of Publication 03.03.2011
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Year of Publication 03.03.2011
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Optical element i.e. mirror, supporting device for fusion of silicon layer on substrate, has elastic units formed as monopods, and optical element and area elongated in square-shaped manner with preset aspect ratio
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Year of Publication 04.02.2010
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Year of Publication 04.02.2010
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Kühler zur Verwendung in einer Vorrichtung im Vakuum
Weigl, Bernhard, Kolloch, Andreas, Anderl, Willi, Kierey, Holger, Bauer, Markus, Wandner, Ann-Kathrin, Schmittner, Arno, Schmelzeisen, Marcus
Year of Publication 25.05.2016
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Year of Publication 25.05.2016
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OPTICAL COMPONENT, INPARTICULAR COLLECTOR FOR USE IN EUV LITHOGRAPHY
KUHN, JOCHEN, MARCZUK, PIOTR, ANDERL, WILLI, WEIGL, BERNHARD, BINGEL, ULRICH, HAFNER, WOLFGANG, DINGER, UDO, MATTHES, AXEL
Year of Publication 10.05.2007
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Year of Publication 10.05.2007
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OPTICAL COMPONENT HAVING AN IMPROVED THERMAL BEHAVIOR
MUENZ, HOLGER, NEIDHARDT, THOMAS, EGLE, WILHELM, ANDERL, WILLI, HAFNER, WOLFGANG, BINGEL, ULRICH
Year of Publication 17.01.2007
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Year of Publication 17.01.2007
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OPTICAL COMPONENT HAVING AN IMPROVED THERMAL BEHAVIOR
MUENZ, HOLGER, NEIDHARDT, THOMAS, EGLE, WILHELM, ANDERL, WILLI, HAFNER, WOLFGANG, BINGEL, ULRICH
Year of Publication 08.06.2006
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Year of Publication 08.06.2006
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OPTICAL COMPONENT HAVING AN IMPROVED THERMAL BEHAVIOR
MUENZ, HOLGER, NEIDHARDT, THOMAS, EGLE, WILHELM, ANDERL, WILLI, HAFNER, WOLFGANG, BINGEL, ULRICH
Year of Publication 17.11.2005
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Year of Publication 17.11.2005
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