CMOS silicide metal gate integration
BOYD, DIANE C, KU, VICTOR, CABRAL, CYRIL JR, LEE, WOO-HYEONG, LI, YING, KAPLAN, RICHARD D, AMOS, RICKY S, KEDZIERSKI, JAKUB T, STEEGEN, AN L, NARAYANAN, VIJAY, SURENDRA, MAHESWAREN, MOCUTA, ANDA C
Year of Publication 16.09.2005
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Year of Publication 16.09.2005
Patent