SUBSTRATE PROCESSING APPARATUS AND SEMICONDUCTOR MANUFACTURING APPARATUS INCLUDING THE SAME
PARK WANJAE, OH DONG-SUB, LEE JAE-HOO, KIM DONG-HOON, HAN MIN-SUNG, LEE SUNG-KIL, NOH MYEONG-SUP, UM YOUNGJE
Year of Publication 30.05.2023
Get full text
Year of Publication 30.05.2023
Patent
Substrate treating apparatus and semiconductor manufacturing equipment including the same
OH DONG SUB, UM YOUNG JE, KIM DONG HUN, HAN MIN SUNG, LEE JAE HOO, NOH MYOUNG SUB, LEE SEONG GIL, PARK WAN JAE
Year of Publication 16.05.2023
Get full text
Year of Publication 16.05.2023
Patent
LPDI Fuel line system for LPDI automobile
KIM DONG SUB, LEE JAEHOON, KIM DAE YONG, JEON WAN JAE, PARK YONG DEOK
Year of Publication 14.07.2021
Get full text
Year of Publication 14.07.2021
Patent
LPDI Fuel line structure for LPDI automobile
KIM DONG SUB, LEE JAEHOON, KIM DAE YONG, JEON WAN JAE, PARK YONG DEOK
Year of Publication 14.07.2021
Get full text
Year of Publication 14.07.2021
Patent
LPDI Fuel pressure control apparatus for LPDI automobile
KIM DONG SUB, LEE JAEHOON, KIM DAE YONG, JEON WAN JAE, PARK YONG DEOK
Year of Publication 07.05.2021
Get full text
Year of Publication 07.05.2021
Patent
SUBSTRATE PROCESSING APPARATUS AND METHOD USING THE PLASMA
BAE, DA SOM, NOH, MYOUNG SUB, KIM, DU RI, KOO, JOUN TAEK, OH, DONG SUB, KIM, DONG HUN, LEE, SEONG GIL, PARK, WAN JAE, UM, YOUNG JE, LEE, JI HWAN
Year of Publication 11.12.2023
Get full text
Year of Publication 11.12.2023
Patent