Two step thermal treatment procedure applied to polycide structures deposited using dichlorosilane as a reactant
SHEU; JER-YUAN, CHENG; KUO-HSIEN, LIAO; HUNG, LIN; WEN JAN, AN; CHI-DI
Year of Publication 13.07.1999
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Year of Publication 13.07.1999
Patent
Method of prevention of irregular oxidization of polysilicon metal in growing dielectric layers
AN, CHI-DI, CHENG, KUO-HSIEN, LIAU, HUNG-JE, LIN, WEN-JAN, SHIU, JE-YUAN
Year of Publication 11.08.1999
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Year of Publication 11.08.1999
Patent