Silicon wafer and process for the heat treatment of a silicon wafer
PETER KROTTENTHALER, JOHANNES STUDENER, FRIEDRICH PASSEK, WILFRIED VON AMMON, REINHOLD WAHLICH, TIMO MUELLER, ERICH DAUB, KLAUS MESSMANN, AMOLD KUEHHOM
Year of Publication 01.06.2009
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Year of Publication 01.06.2009
Patent
Silicon wafer and process for the heat treatment of a silicon wafer
MUELLER, TIMO, JOHANNES STUDENER, FRIEDRICH PASSEK, DAUB, ERICH, MESSMANN, KLAUS, REINHOLD WAHLICH, AMMON, WILFRIED VON, KROTTENTHALER, PETER, AMOLD KUEHHOM
Year of Publication 16.12.2006
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Year of Publication 16.12.2006
Patent