Search Results - "AMIKURA NORIHIKO" :: K.UTB vyhledávací portál

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Processing system and transfer method

by AMIKURA, NORIHIKO, KITA, MASATOMO
Year of Publication 16.08.2022

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Detection device, processing system, and transfer method

by AMIKURA, NORIHIKO, KITA, MASATOMO
Year of Publication 01.07.2022

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Method of arranging treatment process

by Hirose, Jun, Amikura, Norihiko, Miyoshi, Risako
Year of Publication 24.11.2020

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Processing system and transport method

by AMIKURA NORIHIKO, KITA MASATOMO
Year of Publication 13.05.2022

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Transfer apparatus and transfer method

by AMIKURA, NORIHIKO, KITA, MASATOMO
Year of Publication 01.04.2022

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FLOW RATE MEASUREMENT METHOD AND FLOW RATE MEASUREMENT APPARATUS

by MATSUDA, Risako, MIURA, Kazuyuki, AMIKURA, Norihiko
Year of Publication 03.09.2020

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TWI758463B

by MIYOSHI, RISAKO, AMIKURA, NORIHIKO
Year of Publication 21.03.2022

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METHOD OF CALCULATING OUTPUT FLOW RATE OF FLOW RATE CONTROLLER

by Amikura Norihiko, Miyoshi Risako
Year of Publication 16.03.2017

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METHOD OF INSPECTING GAS SUPPLY SYSTEM

by Amikura Norihiko, Miyoshi Risako
Year of Publication 16.03.2017

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Conveying device and conveying method

by AMIKURA NORIHIKO, KITA MASATOMO
Year of Publication 01.03.2022

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Storage module, substrate processing system, and method of transferring a consumable member

by AMIKURA, NORIHIKO, KITA, MASATOMO
Year of Publication 16.01.2022

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GAS SUPPLY SYSTEM, GAS SUPPLY CONTROL METHOD AND GAS REPLACEMENT METHOD

by SAWACHI, Atsushi, AMIKURA, Norihiko, SATO, Yoshiyasu
Year of Publication 03.06.2020

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STORAGE DEVICE, SUBSTRATE PROCESSING SYSTEM AND METHOD OF TRANSFERRING A CONSUMABLE MEMBER

by AMIKURA NORIHIKO, KITA MASATOMO
Year of Publication 21.12.2021

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Gas inspection method, substrate processing method, and substrate processing system

by AMIKURA, NORIHIKO, MATSUDA, RISAKO
Year of Publication 16.12.2021

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Processing system

by AMIKURA NORIHIKO, HIROSE JUN
Year of Publication 02.11.2021

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GAS INSPECTION METHOD, SUBSTRATE PROCESSING METHOD, AND SUBSTRATE PROCESSING SYSTEM

by AMIKURA NORIHIKO, RISAKO MATSUDA
Year of Publication 28.09.2021

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Substrate transfer system, vacuum substrate transfer module and substrate transfer method

by AMIKURA NORIHIKO, KITA MASATOMO
Year of Publication 14.09.2021

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TWI738862B

by MIYOSHI, RISAKO, AMIKURA, NORIHIKO
Year of Publication 11.09.2021

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Gas supply system, substrate processing apparatus, and control method for gas supply system

by AMIKURA, NORIHIKO, SAWACHI, ATSUSHI
Year of Publication 01.09.2021

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SUBSTRATE PROCESSING SYSTEM AND TRANSFER METHOD

by MAKABE, Toshiyuki, KITA, Masatomo, SASAKI, Nobutaka, PARK, Gyeong min, MATSUURA, Shin, AMIKURA, Norihiko
Year of Publication 06.07.2023

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