Increase of Carbon Substitutionality and Silicon Strain by Molecular Ion Implantation
Li-Fatou, Andrei, Jain, Amitabh, Krull, Wade, Ameen, Mike, Harris, Mark, Jacobson, Dale
Published in ECS transactions (28.09.2007)
Published in ECS transactions (28.09.2007)
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Journal Article
System and method for extending a lifetime of an ion source for molecular carbon implants
Colvin, Neil K, Bassom, Neil, Sporleder, David, Ameen, Mike, Xu, Xiao
Year of Publication 12.09.2023
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Year of Publication 12.09.2023
Patent
SYSTEM AND METHOD FOR EXTENDING A LIFETIME OF AN ION SOURCE FOR MOLECULAR CARBON IMPLANTS
Colvin, Neil K, Bassom, Neil, Sporleder, David, Ameen, Mike, Xu, Xiao
Year of Publication 10.12.2020
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Year of Publication 10.12.2020
Patent
FinFET process refinements for improved mobility and gate work function engineering
Yang-Kyu Choi, Leland Chang, Ranade, P., Jeong-Soo Lee, Daewon Ha, Balasubramanian, S., Agarwal, A., Ameen, M., Tsu-Jae King, Bokor, J.
Published in Digest. International Electron Devices Meeting (2002)
Published in Digest. International Electron Devices Meeting (2002)
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Conference Proceeding
Influence of the process sequence and thermal budget on the strain of Si:C stressor layers formed by ion implantation
Rosseel, E, Ortolland, C, Hikavyy, A, Schram, T, Falepin, A, Hoffmann, T, Douhard, B, Moussa, A, Vandervorst, W, Ameen, M, Rubin, L
Published in 2010 18th International Conference on Advanced Thermal Processing of Semiconductors (RTP) (01.09.2010)
Published in 2010 18th International Conference on Advanced Thermal Processing of Semiconductors (RTP) (01.09.2010)
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Conference Proceeding
Implementation of molecular ion implant technology for PMOS extension implants and their compatibility with DRAM process flows
Falepin, A., Collart, E., Tran, S., Harris, M., Ameen, M., Hoffman, T., Rosseel, E., Saino, K., Horiguchi, N., Absil, P.
Published in Extended Abstracts - 2008 8th International Workshop on Junction Technology (IWJT '08) (01.05.2008)
Published in Extended Abstracts - 2008 8th International Workshop on Junction Technology (IWJT '08) (01.05.2008)
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Conference Proceeding