Carrier ring for floating transformer coupled plasma chamber gas plate
ROSLEY CRAIG, SEDDON DAVID, PENG GORDON, AMBARISH. CHAHAT, MAROLL DAN
Year of Publication 06.06.2023
Get full text
Year of Publication 06.06.2023
Patent
Cold edge low temperature electrostatic chuck
AMBARISH. CHAHAT, SHAIKH MOHAMED SOHEIL, MAROLL DAN, CHUNG PATRICK, ROSLEY CRAIG A, SEDDON DAVID A
Year of Publication 04.07.2023
Get full text
Year of Publication 04.07.2023
Patent
Thin masking ring for low tilt trench etch
ROSLEY CRAIG, SEDDON DAVID, AMBARISH. CHAHAT, MAROLL DAN, CANNIFF JUSTIN CHARLES
Year of Publication 23.05.2023
Get full text
Year of Publication 23.05.2023
Patent