PATTERNING DEVICE SUPPORT, LITHOGRAPHIC APPARATUS, AND METHOD OF CONTROLLING PATTERNING DEVICE TEMPERATURE
ALIKHAN ABDULLAH, EARL EBERT, PETER DELMASTRO, SAMIR NAYFEH, DANIEL GALBURT, ONVLEE JOHANNES, DANIEL BURBANK, MARK SCHUSTER, JUSTIN MATTHEW VERDIRAME, FRANK VAN BOXTEL, CHRISTOPHER WARD
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Year of Publication 26.04.2018
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RETICLE COOLING SYSTEM IN LITHOGRAPHIC APPARATUS
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Year of Publication 15.12.2016
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اثر بعض الجرائم الاقتصادية على النمو الاقتصادي في المكسيك للمدة(2020-2000)
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Published in Academic Journal of Nawroz University (26.08.2022)
Published in Academic Journal of Nawroz University (26.08.2022)
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SYSTEM USING TWO PART COVERS FOR PROTECTING RETICLE AND METHOD THEREOF
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Year of Publication 07.01.2004
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VACUUM SHEET BOND FIXTURING AND FLEXIBLE BURL APPLICATIONS FOR SUBSTRATE TABLES
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Year of Publication 30.11.2023
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Year of Publication 30.11.2023
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VACUUM SHEET BOND FIXTURING AND FLEXIBLE BURL APPLICATIONS FOR SUBSTRATE TABLES
HABETS, Michel, SIGAL, Iliya, ENGELEN, Johannes, PIJNENBURG, Johannes, KAMIENIECKI, Daniel, LOMANS, Bram, POIESZ, Thomas, VAN BERKEL, Koos, SOCCI, JR, LEVASIER, Leon, OVERKAMP, Jim, VAN DE VEN, Bastiaan, ALIKHAN, Abdullah, UITTERDIJK, Tammo, DIGUIDO, Gregory
Year of Publication 07.07.2022
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Year of Publication 07.07.2022
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Patterning device support, lithographic apparatus, and method of controlling patterning device temperature
Van Boxtel, Frank Johannes Jacobus, Alikhan, Abdullah, Schuster, Mark Josef, Ebert, Earl William, Onvlee, Johannes, Ward, Christopher Charles, Burbank, Daniel Nathan, Galburt, Daniel Nicholas, Verdirame, Justin Matthew, Nayfeh, Samir A, Delmastro, Peter A
Year of Publication 22.05.2018
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Year of Publication 22.05.2018
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Patterning Device Support, Lithographic Apparatus, And Method Of Controlling Patterning Device Temperature
EBERT Earl William, SCHUSTER Mark Josef, WARD Christopher Charles, VERDIRAME Justin Matthew, ALIKHAN Abdullah, BURBANK Daniel Nathan, ONVLEE Johannes, NAYFEH Samir A, DELMASTRO Peter A, VAN BOXTEL Frank Johannes Jacobus, GALBURT Daniel Nicholas
Year of Publication 26.10.2017
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Year of Publication 26.10.2017
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Patterning device support, lithographic apparatus, and method of controlling patterning device temperature
Van Boxtel Frank Johannes Jacobus, Alikhan Abdullah, Delmastro Peter A, Ebert Earl William, Nayfeh Samir A, Schuster Mark Josef, Burbank Daniel Nathan, Ward Christopher Charles, Verdirame Justin Matthew, Onvlee Johannes, Galburt Daniel Nicholas
Year of Publication 19.09.2017
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Year of Publication 19.09.2017
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Patterning Device Support, Lithographic Apparatus, And Method Of Controlling Patterning Device Temperature
EBERT Earl William, SCHUSTER Mark Josef, WARD Christopher Charles, VERDIRAME Justin Matthew, ALIKHAN Abdullah, BURBANK Daniel Nathan, ONVLEE Johannes, NAYFEH Samir A, DELMASTRO Peter A, VAN BOXTEL Frank Johannes Jacobus, GALBURT Daniel Nicholas
Year of Publication 08.06.2017
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Year of Publication 08.06.2017
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Reticle cooling system in a lithographic apparatus
Van Boxtel Frank Johannes Jacobus, Alikhan Abdullah, Delmastro Peter A, Nayfeh Samir A, Venturino Thomas, Ebert, Jr. Earl William, Schuster Mark Josef, Burbank Daniel Nathan, Ward Christopher Charles, Verdirame Justin Matthew, Onvlee Johannes, Galburt Daniel Nicholas
Year of Publication 25.04.2017
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Year of Publication 25.04.2017
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Patterning device support, lithographic apparatus, and method of controlling patterning device temperature
Van Boxtel Frank Johannes Jacobus, Alikhan Abdullah, Delmastro Peter A, Nayfeh Samir A, Ebert, Jr. Earl William, Schuster Mark Josef, Burbank Daniel Nathan, Ward Christopher Charles, Verdirame Justin Matthew, Onvlee Johannes, Galburt Daniel Nicholas
Year of Publication 25.04.2017
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Year of Publication 25.04.2017
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Vacuum sheet bond fixturing and flexible burl applications for substrate tables
SOCCI, ANTHONY C, VAN DE VEN, BASTIAAN LAMBERTUS WILHELMUS MARINUS, POIESZ, THOMAS, KAMIENIECKI, DANIEL, ALIKHAN, ABDULLAH, OVERKAMP, JIM VINCENT, VAN BERKEL, KOOS, LEVASIER, LEON MARTIN, SIGAL, ILIYA, UITTERDIJK, TAMMO, LOMANS, BRAM ANTONIUS GERARDUS, DIGUIDO, GREGORY JAMES, PIJNENBURG, JOHANNES ADRIANUS CORNELIS MARIA, HABETS, MICHEL BEN ISEL, ENGELEN, JOHANNES BERNARDUS CHARLES
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Year of Publication 01.08.2022
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SYSTEM AND METHOD FOR USING A TWO PART COVER FOR PROTECTING A RETICLE
JONATHAN H. FEROCE, WOODROW J. OLSEN, DUANE P. KISH, ERIK R. LOOPSTRA, SANTIAGO DEL PUERTO, ABDULLAH ALIKHAN, ANDREW MASSAR
Year of Publication 30.10.2013
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Year of Publication 30.10.2013
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Patterning Device Support, Lithographic Apparatus, And Method Of Controlling Patterning Device Temperature
VAN BOXTEL FRANK JOHANNES JACOBUS, ALIKHAN ABDULLAH, SCHUSTER MARK JOSEF, DELMASTRO PETER A, WARD CHRISTOPHER CHARLES, NAYFEH SAMIR A, VERDIRAME JUSTIN MATTHEW, ONVLEE JOHANNES, GALBURT DANIEL NICHOLAS, EBERT, JR. EARL WILLIAM, BURBANK DANIEL NATHAN
Year of Publication 22.10.2015
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Year of Publication 22.10.2015
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System and method for using a two part cover and a box for protecting a reticle
ALIKHAN ABDULLAH, LOOPSTRA ERIK R, FEROCE JONATHAN H, MASSAR ANDREW, OLSEN WOODROW J, KISH DUANE P, DEL PUERTO SANTIAGO
Year of Publication 21.05.2013
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Year of Publication 21.05.2013
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Reticle Cooling System In A Lithographic Apparatus
VAN BOXTEL FRANK JOHANNES JACOBUS, ALIKHAN ABDULLAH, SCHUSTER MARK JOSEF, DELMASTRO PETER A, WARD CHRISTOPHER CHARLES, VENTURINO THOMAS, NAYFEH SAMIR A, VERDIRAME JUSTIN MATTHEW, ONVLEE JOHANNES, GALBURT DANIEL NICHOLAS, EBERT, JR. EARL WILLIAM, BURBANK DANIEL NATHAN
Year of Publication 27.08.2015
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Year of Publication 27.08.2015
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PATTERNING DEVICE SUPPORT, LITHOGRAPHIC APPARATUS, AND METHOD OF CONTROLLING PATTERNING DEVICE TEMPERATURE
EBERT, EARL, DELMASTRO, PETER, NAYFEH, SAMIR, ONVLEE, JOHANNES, SCHUSTER, MARK, VAN BOXTEL, FRANK, GALBURT, DANIEL, WARD, CHRISTOPHER, BURBANK, DANIEL, ALIKHAN, ABDULLAH
Year of Publication 08.05.2014
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Year of Publication 08.05.2014
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System and Method for Using a Two Part Cover and a Box for Protecting a Reticle
ALIKHAN ABDULLAH, LOOPSTRA ERIK R, FEROCE JONATHAN H, MASSAR ANDREW, OLSEN WOODROW J, KISH DUANE P, DEL PUERTO SANTIAGO
Year of Publication 10.01.2013
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Year of Publication 10.01.2013
Patent
SYSTEM AND METHOD FOR USING A TWO PART COVER FOR PROTECTING A RETICLE
JONATHAN H. FEROCE, WOODROW J. OLSEN, DUANE P. KISH, ERIK R. LOOPSTRA, SANTIAGO DEL PUERTO, ABDULLAH ALIKHAN, ANDREW MASSAR
Year of Publication 30.01.2012
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Year of Publication 30.01.2012
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