Modeling and physical analysis of an out-of-plane capacitive MEMS transducer with dynamically coupled electrodes
Bosetti, Gabriele, Manz, Johannes, Dehé, Alfons, Krumbein, Ulrich, Schrag, Gabriele
Published in Microsystem technologies : sensors, actuators, systems integration (01.06.2022)
Published in Microsystem technologies : sensors, actuators, systems integration (01.06.2022)
Get full text
Journal Article
Plasma techniques in the production of customized MEMS‐applications
Bittner, Achim, Hochstein, David, Rockstroh, Jan, Dehnert, Jan, Hedrich, Frank, Billat, Sophie, Dehé, Alfons
Published in Plasma processes and polymers (01.09.2019)
Published in Plasma processes and polymers (01.09.2019)
Get full text
Journal Article
Sensor-Based Nerve Compression Measurement: A Scoping Review of Current Concepts and a Preclinical Evaluation of Commercial Microsensors
Daeschler, Simeon C., Wienbruch, Rebecca, Bursacovschi, Catalina, Zimmermann, Kim Sophie, Nemariam, Selam Bekure, Harhaus, Leila, Kneser, Ulrich, Dehé, Alfons, Bittner, Achim
Published in Frontiers in bioengineering and biotechnology (11.07.2022)
Published in Frontiers in bioengineering and biotechnology (11.07.2022)
Get full text
Journal Article
Investigating fracture strength of poly-silicon membranes using microscopic loading tests and numerical simulation
Brueckner, John, Dehé, Alfons, Auerswald, Ellen, Dudek, Rainer, Vogel, Dietmar, Michel, Bernd, Rzepka, Sven
Published in Microsystem technologies : sensors, actuators, systems integration (01.03.2016)
Published in Microsystem technologies : sensors, actuators, systems integration (01.03.2016)
Get full text
Journal Article
Multi field modeling of a microelectromechanical speaker system with electrostatic driving principle
Tumpold, David, Kaltenbacher, Manfred, Glacer, Christoph, Nawaz, Mohsin, Dehé, Alfons
Published in Microsystem technologies (01.04.2014)
Published in Microsystem technologies (01.04.2014)
Get full text
Journal Article
Conference Proceeding
Design of a poly silicon MEMS microphone for high signal-to-noise ratio
Dehe, Alfons, Wurzer, Martin, Fuldner, Marc, Krumbein, Ulrich
Published in 2013 Proceedings of the European Solid-State Device Research Conference (ESSDERC) (01.09.2013)
Published in 2013 Proceedings of the European Solid-State Device Research Conference (ESSDERC) (01.09.2013)
Get full text
Conference Proceeding
Low Power Capacitive Ultrasonic Transceiver Array for Airborne Object Detection
Anzinger, Sebastian, Lickert, Fabian, Fusco, Alessandra, Bosetti, Gabriele, Tumpold, David, Bretthauer, Christian, Dehe, Alfons
Published in 2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS) (01.01.2020)
Published in 2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS) (01.01.2020)
Get full text
Conference Proceeding
A novel silicon "star-comb" microphone concept for enhanced signal-to-noise-ratio: Modeling, design and first prototype
Manz, Johannes, Bosetti, Gabriele, Dehé, Alfons, Schrag, Gabriele
Published in 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) (01.06.2017)
Published in 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) (01.06.2017)
Get full text
Conference Proceeding
Broadband thermoelectric microwave power sensors using GaAs foundry process
Dehe, A., Fricke-Neuderth, K., Krozer, V.
Published in 2002 IEEE MTT-S International Microwave Symposium Digest (Cat. No.02CH37278) (2002)
Published in 2002 IEEE MTT-S International Microwave Symposium Digest (Cat. No.02CH37278) (2002)
Get full text
Conference Proceeding
Journal Article
Design and Characterization of Macroscopic Indirect Photoacoustic Gas Sensor
Srivastava, Ananya, Tian, Yuanji, Bittner, Achim, Dehe, Alfons
Published in 2022 IEEE Sensors (30.10.2022)
Published in 2022 IEEE Sensors (30.10.2022)
Get full text
Conference Proceeding
Design and Evaluation of a Miniaturized Non-Resonant Photoacoustic CO2 Gas Sensor with Integrated Electronics
Zhang, Nan, Srivastava, Ananya, Li, Xiaolin, Li, Yuanchun, Zhou, Zhenyue, Bittner, Achim, Zhou, Xiaofeng, Dehe, Alfons
Published in 2023 IEEE SENSORS (29.10.2023)
Published in 2023 IEEE SENSORS (29.10.2023)
Get full text
Conference Proceeding
Capacitive out of plane large stroke MEMS structure
Glacer, Christoph, Laur, Rainer, Dehe, Alfons, Tumpold, David
Published in Proceedings of the 2013 9th Conference on Ph.D. Research in Microelectronics and Electronics (PRIME) (01.06.2013)
Published in Proceedings of the 2013 9th Conference on Ph.D. Research in Microelectronics and Electronics (PRIME) (01.06.2013)
Get full text
Conference Proceeding
Statistical strength investigation of poly-silicon membranes using microscopic loading tests and numerical simulation
Brueckner, John, Auerswald, Ellen, Dudek, Rainer, Wunderle, Bernhard, Michel, Bernd, Rzepka, Sven, Dehe, Alfons
Published in 2014 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP) (01.04.2014)
Published in 2014 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP) (01.04.2014)
Get full text
Conference Proceeding