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Year of Publication 07.05.2019
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Year of Publication 07.05.2019
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Multi Regime Plasma Wafer Processing to Increase Directionality of Ions
Kozakevich, Felix, Lucchesi, Kenneth, Zhao, Lin, Holland, John Patrick, Chen, Zhigang, Marakhtanov, Alexei
Year of Publication 14.03.2019
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Year of Publication 14.03.2019
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UNIFORMITY CONTROL CIRCUIT FOR USE WITHIN AN IMPEDANCE MATCHING CIRCUIT
Lucchesi Kenneth, Kozakevich Felix, Marakhtanov Alexei, Holland John Patrick
Year of Publication 13.04.2017
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Year of Publication 13.04.2017
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High Speed Synchronization Of Plasma Source/Bias Power Delivery
BURRY, Aaron M, KOZAKEVICH, Felix Leib, GITLIN, Benjamin J, FISK, II, Larry J, HOLLAND, John, OLDZIEJ, Mariusz, JI, Bing, BHOWMICK, Ranadeep, SMYKA, Jonathan W, MARAKHTANOV, Alexei, RADOMSKI, Aaron T
Year of Publication 06.01.2022
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Year of Publication 06.01.2022
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HIGH SPEED SYNCHRONIZATION OF PLASMA SOURCE/BIAS POWER DELIVERY
BURRY, Aaron M, KOZAKEVICH, Felix Leib, GITLIN, Benjamin J, HOLLAND, John, OLDZIEJ, Mariusz, JI, Bing, BHOWMICK, Ranadeep, SMYKA, Jonathan W, MARAKHTANOV, Alexei, RADOMSKI, Aaron T, FISK, Larry J
Year of Publication 29.11.2021
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Year of Publication 29.11.2021
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Negative ion control for dielectric etch
Bailey, III, Andrew D, Marakhtanov, Alexei, Hudson, Eric, Dhindsa, Rajinder, Abatchev, Mirzafer K
Year of Publication 15.01.2019
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Year of Publication 15.01.2019
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ELECTROSTATIC CHUCK DESIGN FOR COOLING-GAS LIGHT-UP PREVENTION
Kozakevich, Felix, Holland, John Patrick, Marakhtanov, Alexei, Matyushkin, Alexander, Gaff, Keith
Year of Publication 03.01.2019
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Year of Publication 03.01.2019
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