Surface characteristics of parylene-C films in an inductively coupled O2/CF4 gas plasma
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Published in Thin solid films (01.09.2010)
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Kinetics of Chemical Changes in Phenol Formaldehyde Based Polymeric Films Etched in N 2 O and O 2 Inductively Coupled Plasmas: A Comparative Study
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Published in Japanese Journal of Applied Physics (01.08.2009)
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