Search Results - "ALEXANDER N BYKANOV" :: K.UTB vyhledávací portál | TBU Library Retrieval Portal

EUV laser produced plasma source development

EUV laser produced plasma source development

by Farrar, Nigel R., Brandt, David C., Fomenkov, Igor V., Ershov, Alex I., Bowering, Norbert R., Partlo, William N., Myers, David W., Bykanov, Alexander N., Vaschenko, Georgiy O., Khodykin, Oleh V., Hoffman, Jerzy R., Chrobak, Christopher P.
Published in Microelectronic engineering (01.04.2009)

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Journal Article Conference Proceeding

EUV LIGHT SOURCE COMPONENTS AND METHODS FOR PRODUCING, USING AND REPAIRING THE SAME

EUV LIGHT SOURCE COMPONENTS AND METHODS FOR PRODUCING, USING AND REPAIRING THE SAME

by FOMENKOV IGOR V, ALEXANDER N BYKANOV, OLEH V KHODYKIN, BOWERING NORBERT L
Year of Publication 27.07.2015

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Patent

In vitro trial of the pilot prototype of the prostate mechanical imaging system

In vitro trial of the pilot prototype of the prostate mechanical imaging system

by Weiss, Robert E, Hartanto, Victor, Perrotti, Michael, Cummings, Kenneth B, Bykanov, Alexander N, Egorov, Vladimir, Sobolevsky, Sergei A
Published in Urology (Ridgewood, N.J.) (01.12.2001)

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Journal Article

Drive laser for EUV light source

Drive laser for EUV light source

by Bykanov, Alexander N
Year of Publication 29.03.2011

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Patent

Drive laser for EUV light source

Drive laser for EUV light source

by BYKANOV ALEXANDER N
Year of Publication 29.03.2011

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Patent

GAS MANAGEMENT SYSTEM FOR A LASER-PRODUCED-PLASMA EUV LIGHT SOURCE

GAS MANAGEMENT SYSTEM FOR A LASER-PRODUCED-PLASMA EUV LIGHT SOURCE

by ERSHOV, Alexander, I, FOMENKOV, Igor, V, BYKANOV, Alexander, N, BRANDT, David, C
Year of Publication 31.10.2018

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Patent

Laser produced plasma EUV light source

Laser produced plasma EUV light source

by FOMENKOV IGOR V, BYKANOV ALEXANDER N
Year of Publication 22.04.2014

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Patent

Debris protection system having a magnetic field for an EUV light source

Debris protection system having a magnetic field for an EUV light source

by ERSHOV ALEXANDER I, BYKANOV ALEXANDER N
Year of Publication 27.08.2013

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Patent

Method and apparatus for EUV plasma source target delivery target material handling

Method and apparatus for EUV plasma source target delivery target material handling

by Bykanov, Alexander N
Year of Publication 11.11.2008

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Patent

Method and apparatus for EUV plasma source target delivery target material handling

Method and apparatus for EUV plasma source target delivery target material handling

by BYKANOV ALEXANDER N
Year of Publication 11.11.2008

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Patent

Laser produced plasma EUV light source

Laser produced plasma EUV light source

by Bykanov Alexander N, Hansson Bjorn A. M, Brandt David C, Fomenkov Igor V
Year of Publication 18.07.2017

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Patent

LASER PRODUCED PLASMA EUV LIGHT SOURCE

LASER PRODUCED PLASMA EUV LIGHT SOURCE

by ERSHOV, Alexander, I, FOMENKOV, Igor, V, BYKANOV, Alexander, N, BOWERING, Norbert, R, BRANDT, David, C, PARTLO, William, N, KHODYKIN, Oleh, V
Year of Publication 19.06.2019

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Patent

METHOD AND APPARATUS FOR EUV PLASMA SOURCE TARGET DELIVERY TARGET MATERIAL HANDLING

METHOD AND APPARATUS FOR EUV PLASMA SOURCE TARGET DELIVERY TARGET MATERIAL HANDLING

by BYKANOV, ALEXANDER, N
Year of Publication 07.09.2007

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Patent

DRIVE LASER FOR EUV LIGHT SOURCE

DRIVE LASER FOR EUV LIGHT SOURCE

by HOFFMAN, JERZY, R, ERSHOV, ALEXANDER, I, BOWERING, NORBERT, R, BYKANOV, ALEXANDER, N
Year of Publication 31.08.2016

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Patent

APPARATUS FOR EUV PLASMA SOURCE TARGET DELIVERY

APPARATUS FOR EUV PLASMA SOURCE TARGET DELIVERY

by SANDSTROM, Richard L, FOMENKOV, Igor V, ERSHOV, Alexander I, HEMBERG, Oscar, BYKANOV, Alexander N, COBB, Dennis W, ALGOTS, John Martin, PARTLO, William N
Year of Publication 22.08.2018

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Patent

SOURCE MATERIAL DISPENSER FOR EUV LIGHT SOURCE

SOURCE MATERIAL DISPENSER FOR EUV LIGHT SOURCE

by BYKANOV, ALEXANDER, N, KHODYKIN, OLEH
Year of Publication 11.09.2009

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Patent

LPP EUV LIGHT SOURCE DRIVE LASER SYSTEM

LPP EUV LIGHT SOURCE DRIVE LASER SYSTEM

by ERSHOV, ALEXANDER, I, BYKANOV, ALEXANDER, N, FOMENKOV, IGOR, V, KHODYKIN, OLEH
Year of Publication 04.05.2016

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Patent

METHOD AND APPARATUS FOR EUV PLASMA SOURCE TARGET DELIVERY TARGET MATERIAL HANDLING

METHOD AND APPARATUS FOR EUV PLASMA SOURCE TARGET DELIVERY TARGET MATERIAL HANDLING

by BYKANOV, ALEXANDER, N
Year of Publication 31.08.2006

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Patent

Method and apparatus for EUV plasma source target delivery target material handling

Method and apparatus for EUV plasma source target delivery target material handling

by BYKANOV ALEXANDER N
Year of Publication 31.08.2006

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Patent

SOURCE MATERIAL COLLECTION UNIT FOR A LASER PRODUCED PLASMA EUV LIGHT SOURCE

SOURCE MATERIAL COLLECTION UNIT FOR A LASER PRODUCED PLASMA EUV LIGHT SOURCE

by BYKANOV, ALEXANDER, N, HANSSON, BJORN
Year of Publication 15.01.2009

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Patent

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