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Year of Publication 20.09.2022
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Year of Publication 01.12.2023
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METHODS AND APPARATUS FOR CARBON COMPOUND FILM DEPOSITION
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Year of Publication 17.01.2024
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METHODS AND APPARATUS FOR CARBON COMPOUND FILM DEPOSITION
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Year of Publication 23.11.2022
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Year of Publication 23.11.2022
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PROCESS CELL FOR FILED GUIDED POST EXPOSURE BAKE PROCESS
SUN, Jiayi, HANSON, Kyle M, LIANG, Qiwei, YIEH, Ellie Y, HUANG, Lancelot, MCHUGH, Paul R, TSO, Alan L, BUCHBERGER, Jr., Douglas A, KOZHIKKALKANDI, Rahul, LUBOMIRSKY, Dmitry, ALEX, Nithin Thomas
Year of Publication 16.05.2024
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Year of Publication 16.05.2024
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METHODS AND APPARATUS FOR CARBON COMPOUND FILM DEPOSITION
LIANG, Qiwei, YIEH, Ellie Y, CHEN, Erica, ALEX, Nithin Thomas, NEMANI, Srinivas D, YING, Chentsau Chris
Year of Publication 22.07.2021
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Year of Publication 22.07.2021
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METHODS AND APPARATUS FOR CARBON COMPOUND FILM DEPOSITION
LIANG, Qiwei, YIEH, Ellie Y, CHEN, Erica, ALEX, Nithin Thomas, NEMANI, Srinivas D, YING, Chentsau Chris
Year of Publication 15.07.2021
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Year of Publication 15.07.2021
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PROCESS CELL FOR FIELD GUIDED POST EXPOSURE BAKE PROCESS
SUN, Jiayi, BUCHBERGER, Jr. Douglas A, HANSON, Kyle M, LIANG, Qiwei, YIEH, Ellie Y, HUANG, Lance, MCHUGH, Paul R, TSO, Alan L, KOZHIKKALKANDI, Rahul, LUBOMIRSKY, Dmitry, ALEX, Nithin Thomas
Year of Publication 06.10.2022
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Year of Publication 06.10.2022
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Methods and apparatus for carbon compound film deposition
CHEN, ERICA, LIANG, QIWEI, YIEH, ELLIE Y, YING, CHENTSAU CHRIS, NEMANI, SRINIVAS D, ALEX, NITHIN THOMAS
Year of Publication 01.10.2021
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Year of Publication 01.10.2021
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Process cell for field guided post exposure bake process
LUBOMIRSKY, DMITRY, TSO, ALAN L, HANSON, KYLE M, SUN, JIA-YI, KOZHIKKALKANDI, RAHUL, BUCHBERGER JR., DOUGLAS A, LIANG, QIWEI, YIEH, ELLIE Y, HUANG, LANCE LAN-SI, MCHUGH, PAUL R, ALEX, NITHIN THOMAS
Year of Publication 16.11.2022
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Year of Publication 16.11.2022
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