Method of manufacturing a fixed abrasive material
Balijepalli, Sudhakar, Aldrich, Dale J, Grier, Laura A, Erdem, Bedri, Meyers, Gregory F
Year of Publication 27.06.2006
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Year of Publication 27.06.2006
Patent
Method of manufacturing a fixed abrasive material
ALDRICH DALE J, ERDEM BEDRI, BALIJEPALLI SUDHAKAR, GRIER LAURA A, MEYERS GREGORY F
Year of Publication 27.06.2006
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Year of Publication 27.06.2006
Patent
Materials and methods for low pressure chemical-mechanical planarization
Balijepalli, Sudhakar, Aldrich, Dale J, Grier, Laura A, Mills, Michael E
Year of Publication 19.07.2005
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Year of Publication 19.07.2005
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MATERIALS AND METHODS FOR LOW PRESSURE CHEMICAL-MECHANICAL PLANARIZATION
BALIJEPALLI, SUDHAKAR, MILLS, MICHAEL, E, GRIER, LAURA, A, ALDRICH, DALE, J
Year of Publication 26.05.2005
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Year of Publication 26.05.2005
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