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Year of Publication 02.06.2023
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Year of Publication 30.06.2023
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METHOD AND APPARATUS WITH HIGH CONDUCTANCE COMPONENTS FOR CHAMBER CLEANING
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Year of Publication 03.11.2022
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Year of Publication 03.11.2022
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Magnetic-material shield around plasma chambers near pedestal
Pinson, II, Jay D, Dhanakshirur, Akshay, Alayavalli, Kaushik Comandoor, Duan, Ren-Guan, Bera, Kallol, Konnoth Joseph, Job George, Pandey, Abhishek, Nguyen, Andrew, Kalal, Anil Kumar, Sun, Jennifer Y, Ganta, Sathya Swaroop, Lai, Canfeng
Year of Publication 14.05.2024
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Year of Publication 14.05.2024
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SUBSTRATE PROCESSING CHAMBER WITH SIDE GAS INJECTION
PINSON, Jay, MALLICK, Abhijit, DHANAKSHIRUR, Akshay, QI, Bo, WANG, Huiyuan, ALAYAVALLI, Kaushik Comandoor, KUSTRA, Rick
Year of Publication 24.02.2022
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Year of Publication 24.02.2022
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MAGNETIC-MATERIAL SHIELD AROUND PLASMA CHAMBERS NEAR PEDESTAL
GANTA, Sathya Swaroop, DUAN, Ren-Guan, DHANAKSHIRUR, Akshay, LAI, Canfeng, SUN, Jennifer Y, BERA, Kallol, ALAYAVALLI, Kaushik Comandoor, KALAL, Anil Kumar, KONNOTH JOSEPH, Job George, NGUYEN, Andrew, PINSON, II, PANDEY, Abhishek
Year of Publication 12.05.2022
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Year of Publication 12.05.2022
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MAGNETIC-MATERIAL SHIELD AROUND PLASMA CHAMBERS NEAR PEDESTAL
GANTA, Sathya Swaroop, DUAN, Ren-Guan, PINSON, II, Jay D, DHANAKSHIRUR, Akshay, LAI, Canfeng, SUN, Jennifer Y, BERA, Kallol, ALAYAVALLI, Kaushik Comandoor, KALAL, Anil Kumar, KONNOTH JOSEPH, Job George, NGUYEN, Andrew, PANDEY, Abhishek
Year of Publication 05.05.2022
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Year of Publication 05.05.2022
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SHOWERHEAD DESIGN TO CONTROL STRAY DEPOSITION
GANTA, Sathya Swaroop, SINGH, Anup Kumar, HASSAN, Vinayak Vishwanath, PINSON, Jay D, BERA, Kallol, KUSTRA, Rick, RAMAMURTHI, Badri N, DHANAKSHIRUR, Akshay, LAI, Canfeng, KUMAR, Bhaskar, ROCHA-ALVAREZ, Juan Carlos, ALAYAVALLI, Kaushik Comandoor, BALASUBRAMANIAN, Ganesh
Year of Publication 10.03.2022
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Year of Publication 10.03.2022
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SHOWERHEAD DESIGN TO CONTROL STRAY DEPOSITION
GANTA, Sathya Swaroop, SINGH, Anup Kumar, PINSON, II, Jay D, HASSAN, Vinayak Vishwanath, BERA, Kallol, KUSTRA, Rick, RAMAMURTHI, Badri N, DHANAKSHIRUR, Akshay, LAI, Canfeng, KUMAR, Bhaskar, ROCHA-ALVAREZ, Juan Carlos, ALAYAVALLI, Kaushik Comandoor, BALASUBRAMANIAN, Ganesh
Year of Publication 03.03.2022
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Year of Publication 03.03.2022
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Substrate processing chamber with side gas injection
KUSTRA, RICK, MALLICK, ABHIJIT B, QI, BO, DHANAKSHIRUR, AKSHAY, ALAYAVALLI, KAUSHIK COMANDOOR, PINSON, II, WANG, HUIYUAN
Year of Publication 01.04.2022
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Year of Publication 01.04.2022
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Magnetic-material shield around plasma chambers near pedestal
GANTA, SATHYA SWAROOP, PINSON II, JAY D, NGUYEN, ANDREW, PANDEY, ABHISHEK, KONNOTH JOSEPH, JOB GEORGE, DHANAKSHIRUR, AKSHAY, ALAYAVALLI, KAUSHIK COMANDOOR, DUAN, REN-GUAN, BERA, KALLOL, SUN, JENNIFER Y, KALAL, ANIL KUMAR, LAI, CANFENG
Year of Publication 16.09.2022
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Year of Publication 16.09.2022
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Showerhead design to control stray deposition
BALASUBRAMANIAN, GANESH, GANTA, SATHYA SWAROOP, PINSON II, JAY D, KUSTRA, RICK, ALAYAVALLI, KAUSHIK COMANDOOR, RAMAMURTHI, BADRI N, HASSAN, VINAYAK VISHWANATH, KUMAR, BHASKAR, LAI, CANFENG, ROCHA-ALVAREZ, JUAN CARLOS, SINGH, ANUP KUMAR, DHANAKSHIRUR, AKSHAY, BERA, KALLOL
Year of Publication 01.04.2022
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Year of Publication 01.04.2022
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