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Year of Publication 17.05.2006
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Multi-beam multi-column electron beam inspection system
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Year of Publication 20.12.2005
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Year of Publication 20.12.2005
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Multi-beam multi-column electron beam inspection system
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Year of Publication 20.12.2005
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Year of Publication 20.12.2005
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Multi-beam multi-column electron beam inspection system
Yin, Edward M, Brodie, Alan D, Parker, N. William, Tsai, Frank Ching-Feng
Year of Publication 18.01.2005
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Year of Publication 18.01.2005
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Multi-beam multi-column electron beam inspection system
PARKER N. WILLIAM, YIN EDWARD M, TSAI FRANK CHING-FENG, BRODIE ALAN D
Year of Publication 18.01.2005
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Year of Publication 18.01.2005
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Electron optics for multi-beam electron beam lithography tool
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Year of Publication 24.06.2004
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Year of Publication 24.06.2004
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Electron optics for multi-beam electron beam lithography tool
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Year of Publication 09.09.2003
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Year of Publication 09.09.2003
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Electron optics for multi-beam electron beam lithography tool
PARKER N. WILLIAM, YIN EDWARD M, MATTER MICHAEL C, BRODIE ALAN D, GUO GEORGE XINSHENG
Year of Publication 09.09.2003
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Year of Publication 09.09.2003
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ELECTRON OPTICS FOR MULTI-BEAM ELECTRON BEAM LITHOGRAPHY TOOL
PARKER N. WILLIAM, YIN EDWARD M, MATTER MICHAEL C, BRODIE ALAN D, GUO GEORGE XINSHENG
Year of Publication 08.05.2003
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Year of Publication 08.05.2003
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Multi-beam multi-column electron beam inspection system
PARKER N. WILLIAM, YIN EDWARD M, TSAI FRANK CHING-FENG, BRODIE ALAN D
Year of Publication 07.02.2002
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Year of Publication 07.02.2002
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Multi-beam multi-column electron beam inspection system
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Year of Publication 27.08.2001
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Year of Publication 27.08.2001
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MULTI-BEAM MULTI-COLUMN ELECTRON BEAM INSPECTION SYSTEM
BRODIE, ALAN, D, YIN, EDWARD, M, PARKER, N., WILLIAM, TSAI, FRANK, CHING-FENG
Year of Publication 23.08.2001
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Year of Publication 23.08.2001
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Electron optics for multi-beam electron beam lithography tool
MICHAEL C. MATTER, N. WILLIAM PARKER, GEORGE GUO, ALAN D. BRODIE, EDWARD M. YIN
Year of Publication 04.06.2001
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Year of Publication 04.06.2001
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ELECTRON OPTICS FOR MULTI-BEAM ELECTRON BEAM LITHOGRAPHY TOOL
GUO, GEORGE, BRODIE, ALAN, D, YIN, EDWARD, M, PARKER, N., WILLIAM, MATTER, MICHAEL, C
Year of Publication 31.05.2001
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Year of Publication 31.05.2001
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Inspecting optical masks with electron beam microscopy
JAU; JACK Y, BRODIE; ALAN D, CHEN; ZHONG-WEI, GRENON; BRIAN J, MEISBURGER; DAN
Year of Publication 09.09.1997
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Year of Publication 09.09.1997
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High current density particle beam system
CREWE, DAVID A, BRODIE, ALAN D, LANIO, STEFAN, SCHOENECKER, GERALD, FROSIEN, JUERGEN
Year of Publication 11.10.2008
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Year of Publication 11.10.2008
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SYSTEM AND METHOD FOR AUTOMATICALLY INSPECTING SUBSTRATE USING CHARGED PARTICLE BEAM
DESAI ANIL A, CHEN ZHONG-WEI, SMITH DAVE E A, HONFI LESLIE A, ROUGH J KIRKWOOD H, MCMURTRY JOHN, EMGE DENNIS G, SIMMONS RICHARD, MEISBERGER DAN, DUTTA APRIL, PEARCE-PERCY HENRY, MUNRO ERIC, BRODIE ALAN D
Year of Publication 30.07.2003
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Year of Publication 30.07.2003
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DEVICE AND METHOD FOR AUTOMATICALLY INSPECTING SUBSTRATE USING CHARGED PARTICLE BEAM
DESAI ANIL A, CHEN ZHONG-WEI, SMITH DAVE E A, HONFI LESLIE A, ROUGH J KIRKWOOD H, MCMURTRY JOHN, EMGE DENNIS G, SIMMONS RICHARD, MEISBERGER DAN, DUTTA APRIL, PEARCE-PERCY HENRY, MUNRO ERIC, BRODIE ALAN D
Year of Publication 06.09.2002
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Year of Publication 06.09.2002
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