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Year of Publication 17.05.2022
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Year of Publication 29.06.2017
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Year of Publication 29.04.2021
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Year of Publication 08.10.2019
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Year of Publication 22.06.2022
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Year of Publication 10.04.2019
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Method of calibrating a reluctance actuator assembly, reluctance actuator and lithographic apparatus comprising such reluctance actuator
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Year of Publication 06.08.2019
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Year of Publication 15.05.2019
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Year of Publication 15.05.2019
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