RADIATION BEAM APPARATUS
RENKENS, MICHAEL, JOZEF, MATHIJS, DEKKERS, JEROEN, NIENHUYS, HAN-KWANG, AKKERMANS, JOHANNES, ANTONIUS, GERARDUS, LOOPSTRA, ERIK, ROELOF, DE VRIES, GOSSE, CHARLES
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Year of Publication 02.06.2016
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SENSOR, OBJECT POSITIONING SYSTEM, LITHOGRAPHIC APPARATUS AND DEVICE DEVICE MANUFACTURING METHOD
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Year of Publication 16.05.2018
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Year of Publication 16.05.2018
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LITHOGRAPHIC METHOD
DE VRIES Gosse Charles, LITVINENKO Vladimir, ENGELEN Wouter Joep, DE JAGER Pieter Willem Herman, NIKIPELOV Andrey Alexandrovich, LUITEN Otger Jan, NIENHUYS Han-Kwang, GRIMMINCK Leonardus Adrianus Gerardus, FRIJNS Olav Waldemar Vladimir, DONKER Rilpho Ludovicus, BANINE Vadim Yevgenyevich, LOOPSTRA Erik Roelof, KRUIZINGA Borgert, AKKERMANS Johannes Antonius Gerardus
Year of Publication 22.03.2018
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Year of Publication 22.03.2018
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Lithographic method
Nikipelov Andrey Alexandrovich, Litvinenko Vladimir, Frijns Olav Waldemar Vladimir, Loopstra Erik Roelof, Banine Vadim Yevgenyevich, Nienhuys Han-Kwang, Luiten Otger Jan, De Vries Gosse Charles, De Jager Pieter Willem Herman, Donker Rilpho Ludovicus, Engelen Wouter Joep, Kruizinga Borgert, Grimminck Leonardus Adrianus Gerardus, Akkermans Johannes Antonius Gerardus
Year of Publication 21.11.2017
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Year of Publication 21.11.2017
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Method of Calibrating a Reluctance Actuator Assembly, Reluctance Actuator and Lithographic Apparatus Comprising Such Reluctance Actuator
LEMMEN BAS PIETER, HOL SVEN ANTOIN JOHAN, HUIBERTS SJOERD MARTIJN, SINGH HARMEET, HEIJMANS PETER MICHEL SILVESTER MARIA, LOF JOERI, RUTGERS PETRUS THEODORUS, AKKERMANS JOHANNES ANTONIUS GERARDUS
Year of Publication 20.08.2015
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Year of Publication 20.08.2015
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Lithographic method
AKKERMANS, JOHANNES ANTONIUS GERARDUS, NIKIPELOV, ANDREY ALEXANDROVICH, LOOPSTRA, ERIK ROELOF, FRIJNS, OLAV WALDEMAR VLADIMIR, ENGELEN, WOUTER JOEP
Year of Publication 16.11.2019
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Year of Publication 16.11.2019
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SENSOR, OBJECT POSITIONING SYSTEM, LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
LENSSEN Bo, BROERS Sander Christiaan, LEENKNEGT George Alois Leonie, VAN LIESHOUT Richard Henricus Adrianus, VAN DER KRIEKEN Peter, BEERENS Ruud Antonius Catharina Maria, VAN EIJK Jan, SCHELLENS Hendrikus Johannes, CADEE Theodorus Petrus Maria, HEEREN Adrianus Marinus Wouter, DE BEST Jeroen Johannes Theodorus Hendrikus, AKKERMANS Johannes Antonius Gerardus
Year of Publication 28.09.2017
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Year of Publication 28.09.2017
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Electron Injector and Free Electron Laser
Frijns Olav Waldemar Vladimir, Bartraij Petrus Rutgerus, Katalenic Andelko, NIKIPELOV Andrey Alexandrovich, Banine Vadim Yevgenyevich, Loopstra Erik, De Vries Gosse Charles, Op 'T Root Wilhelmus Patrick Elisabeth Maria, De Jager Pieter Willem Herman, Engelen Wouter Joep, Grimminck Leonardus Adrianus Gerardus, Akkermans Johannes Antonius Gerardus, Coenen Teis Johan
Year of Publication 14.09.2017
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Year of Publication 14.09.2017
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Radiation beam apparatus
AKKERMANS, JOHANNES ANTONIUS GERARDUS, DE VRIES, GOSSE CHARLES, LOOPSTRA, ERIK ROELOF, DEKKERS, JEROEN, NIENHUYS, HAN-KWANG, RENKENS, MICHAEL JOZEF MATHIJS
Year of Publication 21.09.2020
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Year of Publication 21.09.2020
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Electron injector and free electron laser
Nikipelov Andrey Alexandrovich, Frijns Olav Waldemar Vladimir, Bartraij Petrus Rutgerus, Katalenic Andelko, Banine Vadim Yevgenyevich, Loopstra Erik, De Vries Gosse Charles, De Jager Pieter Willem Herman, Engelen Wouter Joep, Grimminck Leonardus Adrianus Gerardus, Op'T Root Wilhelmus Patrick Elisabeth Maria, Akkermans Johannes Antonius Gerardus, Coenen Teis Johan
Year of Publication 08.08.2017
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Year of Publication 08.08.2017
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SENSOR, OBJECT POSITIONING SYSTEM, LITHOGRAPHIC APPARATUS AND DEVICE DEVICE MANUFACTURING METHOD
DE BEST, Jeroen Johannes Theodorus Hendrikus, VAN LIESHOUT, Richard, Henricus, Adrianus, VAN DER KRIEKEN, Peter, AKKERMANS, Johannes, Antonius, Gerardus, HEEREN, Adrianus, Marinus, Wouter, BEERENS, Ruud, Antonius, Catharina, Maria, LEENKNEGT, George, Alois, Leonie, SCHELLENS, Hendrikus, Johannes, BROERS, Sander, Christiaan, LENSSEN, Bo, CADEE, Theodorus, Petrus, Maria, VAN EIJK, Jan
Year of Publication 12.07.2017
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Year of Publication 12.07.2017
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Lithographic apparatus and method
BEERENS RUUD ANTONIUS CATHARINA MARIA, VAN DE WAL MARINUS MARIA JOHANNES, AANGENENT WILHELMUS HENRICUS THEODORUS MARIA, HUANG YANG-SHAN, VERMEULEN JOHANNES PETRUS MARTINUS BERNARDUS, AKKERMANS JOHANNES ANTONIUS GERARDUS
Year of Publication 22.09.2015
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Year of Publication 22.09.2015
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METHOD OF CALIBRATING A RELUCTANCE ACTUATOR ASSEMBLY, RELUCTANCE ACTUATOR AND LITHOGRAPHIC APPARATUS COMPRISING SUCH RELUCTANCE ACTUATOR
RUTGERS, PETRUS, THEODORUS, HEIJMANS, PETER, MICHEL, SILVESTER, MARIA, LEMMEN, BAS, PIETER, HOL, SVEN, ANTOIN, JOHAN, SINGH, HARMEET, HUIBERTS, SJOERD, MARTIJN, LOF, JOERI, AKKERMANS, JOHANNES, ANTONIUS, GERARDUS
Year of Publication 24.07.2014
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Year of Publication 24.07.2014
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ELECTRON INJECTOR AND FREE ELECTRON LASER
DE VRIES Gosse Charles, ENGELEN Wouter Joep, DE JAGER Pieter Willem Herman, COENEN Teis Johan, NIKIPELOV Andrey Alexandrovich, OP 'T ROOT Wilhelmus Patrick Elisabeth Maria, KATALENIC Andelko, GRIMMINCK Leonardus Adrianus Gerardus, FRIJNS Olav Waldemar Vladimir, BANINE Vadim Yevgenyevich, LOOPSTRA Erik, BARTRAIJ Petrus Rutgerus, AKKERMANS Johannes Antonius Gerardus
Year of Publication 13.10.2016
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Year of Publication 13.10.2016
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Variable reluctance device, stage apparatus, lithographic apparatus and device manufacturing method
DE BOEIJ JEROEN, AANGENENT WILHELMUS HENRICUS THEODORUS MARIA, HOL SVEN ANTOIN JOHAN, VERMEULEN JOHANNES PETRUS MARTINUS BERNARDUS, CLIJSEN GEORGE WILHELMUS JOHANNES, AKKERMANS JOHANNES ANTONIUS GERARDUS, TER VEER JACOB KORNELIS
Year of Publication 14.07.2015
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Year of Publication 14.07.2015
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