Germanium-on-insulator (GeOI) substrates—A novel engineered substrate for future high performance devices
Akatsu, Takeshi, Deguet, Chrystel, Sanchez, Loic, Allibert, Frédéric, Rouchon, Denis, Signamarcheix, Thomas, Richtarch, Claire, Boussagol, Alice, Loup, Virginie, Mazen, Frédéric, Hartmann, Jean-Michel, Campidelli, Yves, Clavelier, Laurent, Letertre, Fabrice, Kernevez, Nelly, Mazure, Carlos
Published in Materials science in semiconductor processing (01.08.2006)
Published in Materials science in semiconductor processing (01.08.2006)
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Conference Proceeding
Highly-Strained Silicon-On-Insulator Development
Akatsu, Takeshi, Hartmann, Jean-Michel, Aulnette, Cécile, Le Vaillant, Yves-Matthieu, Rouchon, Denis, Abbadie, Alexandra, Bogumilowicz, Yann, Portigliatti, Lionel, Colnat, Cyrille, Boudou, Nicolas, Lallement, Fabrice, Triolet, Fanny, Figuet, Christophe, Martinez, Muriel, Nguyen, Phuong, Delattre, Cécile, Tsyganenko, Kira, Berne, Cécile, Allibert, Frédéric, Deguet, Chrystel
Published in ECS transactions (20.10.2006)
Published in ECS transactions (20.10.2006)
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Journal Article
Ge Diffusion in Strained Si / Relaxed SiGe Heterostrucutures
Bogumilowicz, Yann, Barnes, Jean-Paul, Holliger, Phillipe, Rouchon, Denis, Daval, Nicolas, Hartmann, Jean-Michel, Abbadie, Alexandra, Lallemand, Fabrice, Guiot, Eric, Akatsu, Takeshi, Deguet, Chrystel, Kernevez, Nelly
Published in ECS transactions (20.10.2006)
Published in ECS transactions (20.10.2006)
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Morphology and microstructure of the Ar+-ion sputtered (0001) α-Al2O3 surface
AKATSU, T, SCHEU, C, WAGNER, T, GEMMING, T, HOSODA, N, SUGA, T, RÜHLE, M
Published in Applied surface science (22.09.2000)
Published in Applied surface science (22.09.2000)
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