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Year of Publication 03.11.2020
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Conference Proceeding
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Conference Proceeding
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Published in Meeting abstracts (Electrochemical Society) (22.12.2023)
Published in Meeting abstracts (Electrochemical Society) (22.12.2023)
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A Study of Resistivity Control for Subtractive Interconnects Using Ruthenium
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Published in 2023 IEEE International Interconnect Technology Conference (IITC) and IEEE Materials for Advanced Metallization Conference (MAM)(IITC/MAM) (01.05.2023)
Published in 2023 IEEE International Interconnect Technology Conference (IITC) and IEEE Materials for Advanced Metallization Conference (MAM)(IITC/MAM) (01.05.2023)
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Conference Proceeding
Wafer Surface Control for Ru Capping on Cu interconnect
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Published in 2020 IEEE International Interconnect Technology Conference (IITC) (05.10.2020)
Published in 2020 IEEE International Interconnect Technology Conference (IITC) (05.10.2020)
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Conference Proceeding
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YU, Kai-Hung, YOSHIDA, Yusuke, AIZAWA, Hirokazu, TAPILY, Kandabara, JOY, Nicholas
Year of Publication 06.06.2024
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Year of Publication 06.06.2024
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Method of Conductive Material Deposition
Joy, Nicholas, Yoshida, Yusuke, Tapily, Kandabara, Yu, Kai-Hung, Aizawa, Hirokazu
Year of Publication 30.05.2024
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Year of Publication 30.05.2024
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