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Year of Publication 29.09.2009
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Method of manufacturing vacuum plasma treated workpieces
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Year of Publication 29.09.2009
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Year of Publication 29.09.2009
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ELYAAKOUBI, MUSTAPHA, DELAUNAY, LAURENT, AING, PHANNARA, JOST, STEPHAN
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Year of Publication 09.04.2009
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Vacuum processing chamber for very large area substrates
ELYAAKOUBI, MUSTAPHA, DELAUNAY, LAURENT, AING, PHANNARA, JOST, STEPHAN
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Year of Publication 06.08.2008
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VAKUUMBEHANDLUNGSKAMMER FÜR SEHR GROSSFLÄCHIGE SUBSTRATE
ELYAAKOUBI, MUSTAPHA, DELAUNAY, LAURENT, AING, PHANNARA, JOST, STEPHAN
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Year of Publication 15.04.2008
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VACUUM PROCESSING CHAMBER FOR VERY LARGE AREA SUBSTRATES
ELYAAKOUBI, MUSTAPHA, DELAUNAY, LAURENT, AING, PHANNARA, JOST, STEPHAN
Year of Publication 02.04.2008
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Year of Publication 02.04.2008
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