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"AHN, BYEONG SEOL"
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"AHN, BYEONG SEOL"
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METHOD FOR SEPARATING SCRATCH AND COP USING PARTICLE DETECTION SYSTEM
by
AHN
,
BYEONG SEOL
Year of Publication
29.08.2001
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APPARATUS FOR DETECTING INSERTION STATE OF WAFER INTO CASSETTE IN HANDLER
by
AHN
,
BYEONG SEOL
Year of Publication
16.04.2001
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DEFECT INSPECTING METHOD FOR AUTOMATICALLY CLASSIFYING DEFECT OF SEMICONDUCTOR DEVICE
by
AHN
,
BYEONG SEOL
Year of Publication
06.04.2001
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METHOD OF MEASURING WAFER WARPAGE USING LIGHT BEAMS SCATTERED FROM WAFER
by
AHN
,
BYEONG SEOL
,
LEE, YUN SEOP
Year of Publication
23.12.2004
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WAFER HOLDER
by
AHN
,
BYEONG SEOL
,
PARK, JONG TAE
,
LEE, JIN U
Year of Publication
19.08.2004
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method of manufacturing monitoring wafer of inspection equipment
by
AHN
,
BYEONG SEOL
,
KIM, GYEONG HO
,
KIM, JU U
,
LEE, BYEONG AM
Year of Publication
10.06.2004
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chemistry
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medicine
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basic electric elements
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electric solid state devices not otherwise provided for
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electricity
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semiconductor devices
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conveying
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handling thin or filamentary material
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Korean
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esp@cenet
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