Search Results - "ADRIEN LAVOIE" :: K.UTB vyhledávací portál | TBU Library Retrieval Portal

Tandem source activation for CVD of films

Tandem source activation for CVD of films

by Leeser, Karl, Kang, Hu, LaVoie, Adrien
Year of Publication 03.03.2020

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Patent

METHOD AND APPARATUS FOR MODULATING FILM UNIFORMITY

METHOD AND APPARATUS FOR MODULATING FILM UNIFORMITY

by LAVOIE, Adrien, KUMAR, Purushottam, AGARWAL, Pulkit
Year of Publication 27.02.2020

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Patent

METHOD AND APPARATUS FOR MODULATING FILM UNIFORMITY

METHOD AND APPARATUS FOR MODULATING FILM UNIFORMITY

by LAVOIE, Adrien, KUMAR, Purushottam, AGARWAL, Pulkit
Year of Publication 27.02.2020

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Patent

ULTRATHIN ATOMIC LAYER DEPOSITION FILM ACCURACY THICKNESS CONTROL

ULTRATHIN ATOMIC LAYER DEPOSITION FILM ACCURACY THICKNESS CONTROL

by Qian, Jun, Kumar, Purushottam, Matsuyama, Seiji, Kang, Hu, LaVoie, Adrien
Year of Publication 04.11.2021

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Patent

IN-FEATURE WET ETCH RATE RATIO REDUCTION

IN-FEATURE WET ETCH RATE RATIO REDUCTION

by Pasquale, Frank Loren, Curtin, Ian John, Agnew, Douglas Walter, Gupta, Awnish, Jeon, Eli, LaVoie, Adrien
Year of Publication 13.07.2023

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Patent

Multi-station tool with rotatable top plate assembly

Multi-station tool with rotatable top plate assembly

by LEESER KARL FREDERICK, LAVOIE ADRIEN
Year of Publication 14.03.2023

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Patent

IN-SITU FILM ANNEALING IN SUBSTRATE PROCESSING

IN-SITU FILM ANNEALING IN SUBSTRATE PROCESSING

by Abel, Joseph R, Pasquale, Frank L, Agnew, Douglas Walter, van Schravendijk, Bart Jan, Gupta, Awnish, Lavoie, Adrien
Year of Publication 23.05.2024

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Patent

Self-aligned multi-patterning process flow with ALD gapfill spacer mask

Self-aligned multi-patterning process flow with ALD gapfill spacer mask

by LAVOIE, ADRIEN
Year of Publication 19.06.2018

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Patent

PLASMA ENHANCED ATOMIC LAYER DEPOSITION OF SILICON-CONTAINING FILMS

PLASMA ENHANCED ATOMIC LAYER DEPOSITION OF SILICON-CONTAINING FILMS

by LAVOIE, Adrien, BAKER, Jonathan Grant, ABEL, Joseph R, AGNEW, Douglas Walter, AGARWAL, Pulkit, KUMAR, Ravi, AUSTIN, Dustin Zachary
Year of Publication 15.05.2024

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Patent

SURFACE MODIFIED DEPTH CONTROLLED DEPOSITION FOR PLASMA BASED DEPOSITION

SURFACE MODIFIED DEPTH CONTROLLED DEPOSITION FOR PLASMA BASED DEPOSITION

by Abel, Joseph, Kumar, Purushottam, Lavoie, Adrien
Year of Publication 09.01.2020

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Patent

SURFACE MODIFIED DEPTH CONTROLLED DEPOSITION FOR PLASMA BASED DEPOSITION

SURFACE MODIFIED DEPTH CONTROLLED DEPOSITION FOR PLASMA BASED DEPOSITION

by LAVOIE, Adrien, ABEL, Joseph, KUMAR, Purushottam
Year of Publication 09.01.2020

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Patent

AUTOMATED FEEDFORWARD AND FEEDBACK SEQUENCE FOR PATTERNING CD CONTROL

AUTOMATED FEEDFORWARD AND FEEDBACK SEQUENCE FOR PATTERNING CD CONTROL

by Agarwal, Pulkit, Kumar, Ravi, Roberts, Michael Philip, Lavoie, Adrien, Chandrasekharan, Ramesh
Year of Publication 01.06.2023

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Patent

Fill on demand ampoule refill

Fill on demand ampoule refill

by Nguyen, Tuan, Pasquale, Frank Loren, Petraglia, Jennifer Leigh, Ranganathan, Eashwar, Swaminathan, Shankar, LaVoie, Adrien, Chandrasekharan, Ramesh, Baldasseroni, Chloe
Year of Publication 16.04.2024

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Patent

Atomic layer clean for removal of photoresist patterning scum

Atomic layer clean for removal of photoresist patterning scum

by Agarwal, Pulkit, Kumar, Purushottam, LaVoie, Adrien
Year of Publication 03.12.2019

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Patent

Ultrathin atomic layer deposition film accuracy thickness control

Ultrathin atomic layer deposition film accuracy thickness control

by Qian, Jun, Kumar, Purushottam, Matsuyama, Seiji, Kang, Hu, LaVoie, Adrien
Year of Publication 24.08.2021

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Patent

Method of improving deposition induced CD imbalance using spatially selective ashing of carbon based film

Method of improving deposition induced CD imbalance using spatially selective ashing of carbon based film

by Abel, Joseph R, Agarwal, Pulkit, Kumar, Purushottam, Karim, Ishtak, Lavoie, Adrien
Year of Publication 16.05.2023

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Patent

METHOD OF PROVIDING A PLASMA ATOMIC LAYER DEPOSITION

METHOD OF PROVIDING A PLASMA ATOMIC LAYER DEPOSITION

by LAVOIE, Adrien, KUMAR, Purushottam, AGARWAL, Pulkit
Year of Publication 14.11.2019

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Patent

METHOD OF PROVIDING A PLASMA ATOMIC LAYER DEPOSITION

METHOD OF PROVIDING A PLASMA ATOMIC LAYER DEPOSITION

by LAVOIE, Adrien, KUMAR, Purushottam, AGARWAL, Pulkit
Year of Publication 14.11.2019

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Patent

SYMMETRIC PRECURSOR DELIVERY

SYMMETRIC PRECURSOR DELIVERY

by Kumar, Purushottam, Kersten, Jeffrey, Jeon, Eli, LaVoie, Adrien, Dhar, Gautam
Year of Publication 05.08.2021

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Patent

Azimuthal critical dimension non-uniformity for double patterning process

Azimuthal critical dimension non-uniformity for double patterning process

by Pasquale, Frank Loren, Agarwal, Pulkit, Kumar, Ravi, Lavoie, Adrien
Year of Publication 03.08.2021

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Patent

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