SUBSTRATE PROCESSING SYSTEM FOR SUPPRESSING PARASITIC PLASMA AND REDUCING WITHIN-WAFER NON-UNIFORMITY
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Year of Publication 13.02.2020
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Year of Publication 13.02.2020
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SYSTEM AND METHOD CAPABLE OF LOW DEFECT TREATMENT BY CONTROLLED SEPARATION AND DELIVERY OF CHEMICAL SUBSTANCE DURING ATOMIC LAYER DEPOSITION
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Year of Publication 16.02.2017
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Year of Publication 16.02.2017
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Defect Characterization of ALD Grown SiO2 Films: A Systematic Approach
Pasquale, Frank L, Swaminathan, Shankar, Kang, Hu, Lavoie, Adrien
Published in ECS transactions (01.01.2013)
Published in ECS transactions (01.01.2013)
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DYNAMIC PRECURSOR DOSING FOR ATOMIC LAYER DEPOSITION
ISHTAK KARIM, KANG HU, PURUSHOTTAM KUMAR, ADRIEN LAVOIE, QIAN JUN, OU FUNG SUONG
Year of Publication 18.05.2017
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Year of Publication 18.05.2017
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LOW VOLUME SHOWERHEAD WITH POROUS BAFFLE
KANG HU, SAANGRUT SANGPLUNG, SHANKAR SWAMINATHAN, ADRIEN LAVOIE, RAMESH CHANDRASEKHARAN, FRANK PASQUALE
Year of Publication 17.03.2016
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Year of Publication 17.03.2016
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SUPPLEMENT OF ON-DEMAND CHARGING AMPOULE
EASHWAR RANGANATHAN, NGUYEN TUAN, CHLOE BALDASSERONI, FRANK L PASQUALE, JENNIFER L PETRAGLIA, SHANKAR SWAMINATHAN, ADRIEN LAVOIE, RAMESH CHANDRASEKHARAN
Year of Publication 19.01.2017
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Year of Publication 19.01.2017
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SOFT LANDING NANOLAMINATE FOR ADVANCED PATTERNING
NADER SHAMMA, FRANK L PASQUALE, GIRISH DIXIT, SHANKAR SWAMINATHAN, ADRIEN LAVOIE
Year of Publication 18.06.2015
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Year of Publication 18.06.2015
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PLANAR SUBSTRATE EDGE CONTACT WITH OPEN VOLUME EQUALIZATION PATHWAYS AND SIDE CONTAINMENT
PATRICK BREILING, KARL LEESER, ADRIEN LAVOIE, SHANKAR SWAMINATHAN, RAMESH CHANDRASEKHARAN, EDMUND MINSHALL, KIM SUNG JE, ISHTAK KARIM, SAKIYAMA YUKINORI, CHLOE BALDASSERONI, ANDREW DUVALL, PAUL KONKOLA, FRANK PASQUALE
Year of Publication 17.05.2018
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Year of Publication 17.05.2018
Patent