Search Results - "ADRIEN LAVOIE" :: K.UTB vyhledávací portál

DYNAMIC PRECURSOR DOSING FOR ATOMIC LAYER DEPOSITION

by Ou, Fung Suong, Qian, Jun, Kumar, Purushottam, Karim, Ishtak, Kang, Hu, LaVoie, Adrien
Year of Publication 24.01.2019

Get full text

Patent

Loading…

Liquid phase molecular self-assembly for barrier deposition and structures formed thereby

by LAVOIE ADRIEN R
Year of Publication 21.09.2010

Get full text

Patent

Loading…

Liquid phase molecular self-assembly for barrier deposition and structures formed thereby

by Lavoie, Adrien R
Year of Publication 21.09.2010

Get full text

Patent

Loading…

Vacuum-integrated hardmask processes and apparatus

by Reddy, Sirish K, Hausmann, Dennis M, Knisley, Thomas Joseph, Gottscho, Richard A, Varadarajan, Bhadri N, Antonelli, George Andrew, Marks, Jeffrey, LaVoie, Adrien, Kolics, Artur
Year of Publication 10.11.2020

Get full text

Patent

Loading…

Surface modified depth controlled deposition for plasma based deposition

by KUMAR, PURUSHOTTAM, LAVOIE, ADRIEN, ABEL, JOSEPH
Year of Publication 01.05.2020

Get full text

Patent

Loading…

METHODS FOR MODULATING RESIDUAL STRESS IN THIN FILMS

by KUMAR, PURUSHOTTAM, QIAN, JUN, LAVOIE, ADRIEN, KANG, HU
Year of Publication 29.12.2016

Get full text

Patent

Loading…

Variable cycle and time rf activation method for film thickness matching in a multi-station deposition system

by CHO, KIYONG, KARIM, ISHTAK, KUMAR, PURUSHOTTAM, GULIANI, JASWINDER, QIAN, JUN, LAVOIE, ADRIEN
Year of Publication 01.10.2023

Get full text

Patent

Loading…

SYSTEMS AND METHODS FOR SUPPRESSING PARASITIC PLASMA AND REDUCING WITHIN-WAFER NON-UNIFORMITY

by Keil, Douglas, Duvall, Andrew, Minshall, Ted, Varadarajan, Sesha, Smith, David, LaVoie, Adrien, Baldasseroni, Chloe, Augustyniak, Edward, Leeser, Karl, Pasquale, Frank, Qian, Jun, Petraglia, Jennifer, Kang, Hu, Swaminathan, Shankar
Year of Publication 22.10.2020

Get full text

Patent

Loading…

Systems and methods for detection of plasma instability by electrical measurement

by Keil, Douglas, Sakiyama, Yukinori, Karim, Ishtak, LaVoie, Adrien, Chandrasekharan, Ramesh, Rangineni, Yaswanth, Augustyniak, Edward
Year of Publication 13.11.2018

Get full text

Patent

Loading…

SELECTIVE ATOMIC LAYER DEPOSITION WITH POST-DOSE TREATMENT

by Pasquale, Frank L, Qian, Jun, Kumar, Purushottam, van Schravendijk, Bart J, Karim, Ishtak, LaVoie, Adrien
Year of Publication 08.11.2018

Get full text

Patent

Loading…

SYSTEMS AND METHODS FOR FLOW MONITORING IN A PRECURSOR VAPOR SUPPLY SYSTEM OF A SUBSTRATE PROCESSING SYSTEM

by PURUSHOTTAM Kumar, Adrien LaVoie, Sun Je Kim, You Zhai, Jun Qian, Jeremiah BALDWIN
Year of Publication 30.10.2018

Get full text

Patent

Loading…

Atomic layer clean for removal of photoresist patterning scum

by KUMAR PURUSHOTTAM, AGARWAL PULKIT, LAVOIE ADRIEN
Year of Publication 17.03.2020

Get full text

Patent

Loading…

METHODS OF MODULATING RESIDUAL STRESS IN THIN FILMS

by Qian Jun, Kumar Purushottam, LaVoie Adrien, Kang Hu
Year of Publication 10.11.2016

Get full text

Patent

Loading…

Dynamic precursor dosing for atomic layer deposition

by Ou, Fung Suong, Qian, Jun, Kumar, Purushottam, Karim, Ishtak, Kang, Hu, LaVoie, Adrien
Year of Publication 09.10.2018

Get full text

Patent

Loading…

APPARATUS FOR CLEANING PLASMA CHAMBERS

by KUMAR PURUSHOTTAM, PASQUALE FRANK LOREN, AGARWAL PULKIT, LAVOIE ADRIEN
Year of Publication 02.11.2021

Get full text

Patent

Loading…

CAPPED ALD FILMS FOR DOPING FIN-SHAPED CHANNEL REGIONS OF 3-D IC TRANSISTORS

by Banerji, Ananda K, Qian, Jun, Varadarajan, Bhadri N, Tan, Samantha, Swaminathan, Shankar, LaVoie, Adrien, Arghavani, Reza
Year of Publication 20.09.2018

Get full text

Patent