Search Results - "ADRIEN LAVOIE" :: K.UTB vyhledávací portál

USE OF ROTATION TO CORRECT FOR AZIMUTHAL NON-UNIFORMITIES IN SEMICONDUCTOR SUBSTRATE PROCESSING

by CHANDRASEKHARAN, Ramesh, LAVOIE, Adrien, VARADARAJAN, Seshasayee, ROBERTS, Michael Philip, AGARWAL, Pulkit, CARBERY, Marcus, KUMAR, Ravi
Year of Publication 24.12.2020

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SYSTEM AND METHOD FOR REDUCING EXHAUST ACCUMULATION IN A SUCTION EXHAUST SYSTEM

by STEVEN GOZA, XAVIER ANTONIO, CHANDRASEKARAN, RAMESH, LAVOIE ADRIEN, NESMITH JOSEPH
Year of Publication 05.12.2023

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PURGE AND PUMPING STRUCTURES ARRANGED BENEATH SUBSTRATE PLANE TO REDUCE DEFECTS

by Chandrasekharan Ramesh, Lavoie Adrien, Swaminathan Shankar
Year of Publication 06.04.2017

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PLASMA ACTIVATED CONFORMAL DIELECTRIC FILM DEPOSITION

by LAVOIE, ADRIEN, SRIRAM, MANDYAM
Year of Publication 10.05.2013

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INTEGRATED DRY PROCESSES FOR PATTERNING RADIATION PHOTORESIST PATTERNING

by TAN, Samantha S.H, PAN, Yang, LAVOIE, Adrien, WISE, Richard, LIN, Qinghuang, KANAKASABAPATHY, Sivananda Krishnan, YU, Jengyi, GOTTSCHO, Richard A, WEIDMAN, Timothy William, HUBACEK, Jerome, ALVI, Mohammed Haroon
Year of Publication 30.08.2023

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FILL ON DEMAND AMPOULE REFILL

by Nguyen, Tuan, Pasquale, Frank Loren, Petraglia, Jennifer Leigh, Ranganathan, Eashwar, Swaminathan, Shankar, LaVoie, Adrien, Chandrasekharan, Ramesh, Baldasseroni, Chloe
Year of Publication 21.10.2021

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Method and controller for controlling core critical dimension variation using flash trim sequence

by KUMAR, PURUSHOTTAM, AGARWAL, PULKIT, LAVOIE, ADRIEN, KUMAR, RAVI
Year of Publication 21.11.2023

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Planar substrate edge contact with open volume equalization pathways and side containment

by Duvall, Andrew, Breiling, Patrick, Karim, Ishtak, Chandrasekharan, Ramesh, LaVoie, Adrien, Minshall, Edmund, Kim, Sung Je, Baldasseroni, Chloe, Leeser, Karl, Pasquale, Frank, Sakiyama, Yukinori, Swaminathan, Shankar, Konkola, Paul
Year of Publication 13.09.2022

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METHODS AND APPARATUSES FOR INCREASING REACTOR PROCESSING BATCH SIZE

by Agarwal, Pulkit, Kumar, Purushottam, Phillips, Richard, LaVoie, Adrien
Year of Publication 27.12.2018

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Plasma assisted atomic layer deposition titanium oxide for conformal encapsulation and gapfill applications

by LaVoie Adrien, Swaminathan Shankar, Pasquale Frank L
Year of Publication 14.02.2017

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PLASMA ACTIVATED CONFORMAL DIELECTRIC FILM DEPOSITION

by LAVOIE, ADRIEN, SRIRAM, MANDYAM
Year of Publication 07.03.2013

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Multi-station plasma reactor with RF balancing

by Leeser, Karl F, Kapoor, Sunil, LaVoie, Adrien, Rangineni, Yaswanth
Year of Publication 04.12.2018

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METHOD FOR PROVIDING DOPED SILICON

by MIAO, Tengfei, LAVOIE, Adrien, ABEL, Joseph R, VAN SCHRAVENDIJK, Bart J, KUMAR, Purushottam, JIANG, Gengwei
Year of Publication 01.10.2020

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RAPID TUNING OF CRITICAL DIMENSION NON-UNIFORMITY BY MODULATING TEMPERATURE TRANSIENTS OF MULTI-ZONE SUBSTRATE SUPPORTS

by CHANDRASEKHARAN, Ramesh, LAVOIE, Adrien, ROBERTS, Michael Philip, AGARWAL, Pulkit, KUMAR, Ravi
Year of Publication 24.09.2020

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Fill on demand ampoule refill

by Nguyen, Tuan, Pasquale, Frank L, Petraglia, Jennifer L, Ranganathan, Eashwar, Swaminathan, Shankar, LaVoie, Adrien, Chandrasekharan, Ramesh, Baldasseroni, Chloe
Year of Publication 27.07.2021

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