CMOS architecture with thermally stable silicide gate work function metal
LILAK AARON D, RACHMADY WILLY, PHAN ANH, KAVALIEROS JACK T, DEWEY GILBERT, MANNEBACH EHREN, ACTON ORAN, HUANG CHANG-YU
Year of Publication 04.04.2023
Get full text
Year of Publication 04.04.2023
Patent