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Year of Publication 13.09.2017
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A COMPOSITE EDGE RING
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ION BEAM SPUTTERING WITH ION ASSISTED DEPOSITION FOR COATINGS ON CHAMBER COMPONENTS
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Year of Publication 01.06.2023
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Ion beam sputtering with ion assisted deposition for coatings on chamber components
Firouzdor, Vahid, Zhang, Ying, Achutharaman, Vedapuram S, Kanungo, Biraja Prasad, Sun, Jennifer Y, Cho, Tom K
Year of Publication 31.01.2023
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Year of Publication 31.01.2023
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Ion beam sputtering with ion assisted deposition for coatings on chamber components
Firouzdor, Vahid, Zhang, Ying, Achutharaman, Vedapuram S, Kanungo, Biraja Prasad, Sun, Jennifer Y, Cho, Tom K
Year of Publication 31.01.2023
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Year of Publication 31.01.2023
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Ion beam sputtering with ion assisted deposition for coatings on chamber components
Firouzdor, Vahid, Zhang, Ying, Achutharaman, Vedapuram S, Kanungo, Biraja Prasad, Sun, Jennifer Y, Cho, Tom K
Year of Publication 31.01.2023
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Year of Publication 31.01.2023
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Universal process kit
Rogers, James, Joubert, Olivier, Kenney, Jason A, Achutharaman, Vedapuram S, Luere, Olivier, Srinivasan, Sunil, Dhindsa, Rajinder
Year of Publication 29.06.2021
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Year of Publication 29.06.2021
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ION BEAM SPUTTERING WITH ION ASSISTED DEPOSITION FOR COATINGS ON CHAMBER COMPONENTS
Firouzdor, Vahid, Zhang, Ying, Achutharaman, Vedapuram S, Kanungo, Biraja Prasad, Sun, Jennifer Y, Cho, Tom K
Year of Publication 19.04.2018
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Year of Publication 19.04.2018
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ION BEAM SPUTTERING WITH ION ASSISTED DEPOSITION FOR COATINGS ON CHAMBER COMPONENTS
Cho Tom K, Sun Jennifer Y, Firouzdor Vahid, Achutharaman Vedapuram S, Kanungo Biraja Prasad, Zhang Ying
Year of Publication 11.01.2018
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Year of Publication 11.01.2018
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ION BEAM SPUTTERING WITH ION ASSISTED DEPOSITION FOR COATINGS ON CHAMBER COMPONENTS
Cho Tom K, Sun Jennifer Y, Firouzdor Vahid, Achutharaman Vedapuram S, Kanungo Biraja Prasad, Zhang Ying
Year of Publication 11.01.2018
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Year of Publication 11.01.2018
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Ion beam sputtering with ion assisted deposition for coatings on chamber components
Cho Tom K, Sun Jennifer Y, Firouzdor Vahid, Achutharaman Vedapuram S, Kanungo Biraja Prasad, Zhang Ying
Year of Publication 24.10.2017
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Year of Publication 24.10.2017
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Composite edge ring
Srinivasan Sunil, Luere Olivier, Joubert Olivier, Rogers James, Kenney Jason A, Dhindsa Rajinder, Achutharaman Vedapuram S
Year of Publication 19.09.2017
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Year of Publication 19.09.2017
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UNIVERSAL PROCESS KIT
JOUBERT Olivier, KENNEY Jason A, ROGERS James, DHINDSA Rajinder, ACHUTHARAMAN Vedapuram S, SRINIVASAN Sunil, LUERE Olivier
Year of Publication 07.09.2017
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Year of Publication 07.09.2017
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Ion beam sputtering with ion assisted deposition for coatings on chamber components
Cho Tom K, Sun Jennifer Y, Firouzdor Vahid, Achutharaman Vedapuram S, Kanungo Biraja Prasad, Zhang Ying
Year of Publication 08.08.2017
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Year of Publication 08.08.2017
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ION BEAM SPUTTERING WITH ION ASSISTED DEPOSITION FOR COATINGS ON CHAMBER COMPONENTS
Cho Tom K, Sun Jennifer Y, Firouzdor Vahid, Achutharaman Vedapuram S, Kanungo Biraja Prasad, Zhang Ying
Year of Publication 10.11.2016
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Year of Publication 10.11.2016
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Process kit and plasma chamber comprising the same
SRINIVASAN, SUNIL, DHINDSA, RAJINDER, ACHUTHARAMAN, VEDAPURAM S, JOUBERT, OLIVIER, KENNEY, JASON A, ROGERS, JAMES, LUERE, OLIVIER
Year of Publication 16.11.2021
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Year of Publication 16.11.2021
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