AN IMPROVED SUBSTRATE SUPPORT
WON TAE KYUNG, SEETHARAMU RAGHAV MIRLE, ACHARY UMESHA, YADAV SANJAY D, ROY SUBHASISH
Year of Publication 20.01.2021
Get full text
Year of Publication 20.01.2021
Patent
기판 온도 모니터링
RAO SHREESHA Y, WON TAE KYUNG, YADAV SANJAY D, ACHARY UMESHA, JOSHI HIMANSHU
Year of Publication 09.01.2019
Get full text
Year of Publication 09.01.2019
Patent
개선된 기판 지지부
WON TAE KYUNG, SEETHARAMU RAGHAV MIRLE, ACHARY UMESHA, YADAV SANJAY D, ROY SUBHASISH
Year of Publication 05.12.2018
Get full text
Year of Publication 05.12.2018
Patent
DIFFUSER FOR UNIFORMITY IMPROVEMENT IN DISPLAY PECVD APPLICATIONS
YADAV, Sanjay D, CHOI, Soo Young, ZHAO, Lai, SHIH, Ko-Ta, ACHARY, Umesha, FURUTA, Gaku
Year of Publication 29.11.2018
Get full text
Year of Publication 29.11.2018
Patent
AN IMPROVED SUBSTRATE SUPPORT
YADAV, Sanjay D, SEETHARAMU, Raghav Mirle, ROY, Subhasish, ACHARY, Umesha, WON, Tae Kyung
Year of Publication 18.01.2018
Get full text
Year of Publication 18.01.2018
Patent
AN IMPROVED SUBSTRATE SUPPORT
YADAV Sanjay D, ROY Subhasish, WON Tae Kyung, SEETHARAMU Raghav Mirle, ACHARY Umesha
Year of Publication 18.01.2018
Get full text
Year of Publication 18.01.2018
Patent
SUBSTRATE TEMPERATURE MONITORING
YADAV, Sanjay D, ACHARY, Umesha, RAO, Shreesha Y, WON, Tae Kyung, JOSHI, Himanshu
Year of Publication 28.12.2017
Get full text
Year of Publication 28.12.2017
Patent
SUBSTRATE TEMPERATURE MONITORING
YADAV Sanjay D, WON Tae Kyung, JOSHI Himanshu, RAO Shreesha Y, ACHARY Umesha
Year of Publication 21.12.2017
Get full text
Year of Publication 21.12.2017
Patent
Support plate and an improved substrate support assembly and chamber using the same
ROY, SUBHASISH, YADAV, SANJAY D, WON, TAE KYUNG, ACHARY, UMESHA, SEETHARAMU, RAGHAV MIRLE
Year of Publication 21.08.2021
Get full text
Year of Publication 21.08.2021
Patent
Substrate support assembly and processing chamber having the same
YADAV, SANJAY D, JOSHI, HIMANSHU, WON, TAE KYUNG, RAO, SHREESHA Y, ACHARY, UMESHA
Year of Publication 11.07.2019
Get full text
Year of Publication 11.07.2019
Patent
SUBSTRATE TEMPERATURE MONITORING
RAO SHREESHA Y, YADAV SANJAY D, ACHARY UMESHA, JOSHI HIMANSHU, WON TAE-KYUNG
Year of Publication 04.01.2019
Get full text
Year of Publication 04.01.2019
Patent
AN IMPROVED SUBSTRATE SUPPORT
WON TAE KYUNG, SEETHARAMU RAGHAV MIRLE, ACHARY UMESHA, YADAV SANJAY D, ROY SUBHASISH
Year of Publication 21.12.2018
Get full text
Year of Publication 21.12.2018
Patent
Support plate and an improved substrate support assembly and chamber using the same
ROY, SUBHASISH, YADAV, SANJAY D, WON, TAE KYUNG, ACHARY, UMESHA, SEETHARAMU, RAGHAV MIRLE
Year of Publication 01.04.2018
Get full text
Year of Publication 01.04.2018
Patent
Substrate support assembly and processing chamber having the same
YADAV, SANJAY D, JOSHI, HIMANSHU, WON, TAE KYUNG, RAO, SHREESHA Y, ACHARY, UMESHA
Year of Publication 16.03.2018
Get full text
Year of Publication 16.03.2018
Patent