Search Results - "ABRAHAM MATHEW CHEERAN" :: K.UTB vyhledávací portál

타겟 재료 전달 시스템의 수명을 연장시키기 위한 장치 및 방법

by ERSHOV ALEXANDER IGOREVICH, ROLLINGER BOB, VASCHENKO GEORGIY OLEGOVICH, ABRAHAM MATHEW CHEERAN, LUKENS JOSHUA MARK, RAJYAGURU CHIRAG
Year of Publication 01.07.2021

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EUV 용기 및 EUV 콜렉터의 타겟 재료 잔해 세정을 위한 시스템, 방법 및 장치

by GAZZA JACK MICHAEL, BAEK JONGHOON, ABRAHAM MATHEW CHEERAN, EVANS DAVID ROBERT
Year of Publication 19.09.2018

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CLEANING A SURFACE OF AN OPTIC WITHIN A CHAMBER OF AN EXTREME ULTRAVIOLET LIGHT SOURCE

by JONGHOON BAEK, MATHEW CHEERAN ABRAHAM
Year of Publication 08.05.2019

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Apparatus and method for extending target material delivery system lifetime

by Abraham, Mathew Cheeran, Rajyaguru, Chirag, Rollinger, Bob, Vaschenko, Georgiy Olegovich, Lukens, Joshua Mark, Ershov, Alexander Igorevich
Year of Publication 27.06.2023

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APPARATUS AND METHOD FOR EXTENDING TARGET MATERIAL DELIVERY SYSTEM LIFETIME

by Abraham, Mathew Cheeran, Rajyaguru, Chirag, Rollinger, Bob, Vaschenko, Georgiy Olegovich, Lukens, Joshua Mark, Ershov, Alexander Igorevich
Year of Publication 16.12.2021

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APPARATUS AND METHOD FOR EXTENDING TARGET MATERIAL DELIVERY SYSTEM LIFETIME

by RAJYAGURU, Chirag, ERSHOV, Alexander Igorevich, LUKENS, Joshua Mark, ABRAHAM, Mathew Cheeran, ROLLINGER, Bob, VASCHENKO, Georgiy Olegovich
Year of Publication 08.09.2021

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System, method and apparatus for target material debris cleaning of EUV vessel and EUV collector

by Abraham, Mathew Cheeran, Baek, Jonghoon, Evans, David Robert, Gazza, Jack Michael
Year of Publication 18.05.2021

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APPARATUS AND METHOD FOR EXTENDING TARGET MATERIAL DELIVERY SYSTEM LIFETIME

by CHIRAG RAJYAGURU, GEORGIY OLEGOVICH VASCHENKO, ALEXANDER IGOREVICH ERSHOV, JOSHUA MARK LUKENS, MATHEW CHEERAN ABRAHAM, BOB ROLLINGER
Year of Publication 13.05.2020

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APPARATUS AND METHOD FOR EXTENDING TARGET MATERIAL DELIVERY SYSTEM LIFETIME

by RAJYAGURU, Chirag, ERSHOV, Alexander Igorevich, LUKENS, Joshua Mark, ABRAHAM, Mathew Cheeran, ROLLINGER, Bob, VASCHENKO, Georgiy Olegovich
Year of Publication 07.05.2020

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SYSTEM, METHOD AND APPARATUS FOR TARGET MATERIAL DEBRIS CLEANING OF EUV VESSEL AND EUV COLLECTOR

by EVANS, David Robert, ABRAHAM, Mathew Cheeran, GAZZA, Jack Michael, BAEK, Jonghoon
Year of Publication 30.01.2020

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System, method and apparatus for target material debris cleaning of EUV vessel and EUV collector

by Abraham, Mathew Cheeran, Baek, Jonghoon, Evans, David Robert, Gazza, Jack Michael
Year of Publication 12.11.2019

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SYSTEM, METHOD AND APPARATUS FOR TARGET MATERIAL DEBRIS CLEANING OF EUV VESSEL AND EUV COLLECTOR

by EVANS, David Robert, ABRAHAM, Mathew Cheeran, GAZZA, Jack Michael, BAEK, Jonghoon
Year of Publication 19.09.2019

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System, method and apparatus for target material debris cleaning of EUV vessel and EUV collector

by Abraham, Mathew Cheeran, Baek, Jonghoon, Evans, David Robert, Gazza, Jack Michael
Year of Publication 23.07.2019

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Apparatus for and method of extending target material delivery system lifetime

by ABRAHAM, MATHEW CHEERAN, ROLLINGER, BOB, RAJYAGURU, CHIRAG, VASCHENKO, GEORGIY OLEGOVICH, LUKENS, JOSHUA MARK, ERSHOV, ALEXANDER IGOREVICH
Year of Publication 21.12.2023

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