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Year of Publication 29.11.2023
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Year of Publication 27.05.2024
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Year of Publication 04.08.2022
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Year of Publication 31.03.2023
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Year of Publication 31.03.2023
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Year of Publication 03.03.2023
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Year of Publication 17.01.2022
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Year of Publication 17.01.2022
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Year of Publication 14.04.2022
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갭 충진 동안 심 완화 및 통합된 라이너
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유기실리콘 전구체를 사용한 웨이퍼 표면의 소수성 개질
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Year of Publication 19.11.2020
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희생적 에칭 캡 층을 활용하여 고 종횡비 피처들의 유전체 갭충진
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Year of Publication 23.04.2020
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Year of Publication 23.04.2020
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