EUV Membrane for EUV lithography
PETER MARIA, NASALEVICH MAXIM ALEKSANDROVICH, VAN DE KERKHOF MARCUS ADRIANUS, BANERJEE NIRUPAM, ZDRAVKOV ALEXANDAR NIKOLOV, VERBURG ANTONIUS WILLEM, BLAUW MICHIEL ALEXANDER, BROUNS DERK SERVATIUS GERTRUDA, VERMEULEN JOHANNES PETRUS MARTINUS BERNARDUS, LENDERINK EGBERT, NIKIPELOV ANDREY, RISPENS GIJSBERT, JANSSEN PAUL, ABEGG ERIK ACHILLES, VLES DAVID FERDINAND, VOORTHUIJZEN WILLEM PIETER, KRUIZINGA MATTHIAS, VAN ZWOL PIETER JAN, PILIEGO CLAUDIA, VAN DER ZANDE WILLEM JOAN, SCHUH NADJA, MAXIM NICOLAE, NOTENBOOM ARNOUD WILLEM
Year of Publication 16.02.2023
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Year of Publication 16.02.2023
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EUV Membrane for EUV lithography
PETER MARIA, NASALEVICH MAXIM ALEKSANDROVICH, VAN DE KERKHOF MARCUS ADRIANUS, BANERJEE NIRUPAM, ZDRAVKOV ALEXANDAR NIKOLOV, VERBURG ANTONIUS WILLEM, BLAUW MICHIEL ALEXANDER, BROUNS DERK SERVATIUS GERTRUDA, VERMEULEN JOHANNES PETRUS MARTINUS BERNARDUS, LENDERINK EGBERT, NIKIPELOV ANDREY, RISPENS GIJSBERT, JANSSEN PAUL, ABEGG ERIK ACHILLES, VLES DAVID FERDINAND, VOORTHUIJZEN WILLEM PIETER, KRUIZINGA MATTHIAS, VAN ZWOL PIETER JAN, PILIEGO CLAUDIA, VAN DER ZANDE WILLEM JOAN, SCHUH NADJA, MAXIM NICOLAE, NOTENBOOM ARNOUD WILLEM
Year of Publication 24.12.2021
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Year of Publication 24.12.2021
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펠리클 및 펠리클 조립체
PETER MARIA, NASALEVICH MAXIM ALEKSANDROVICH, VAN DE KERKHOF MARCUS ADRIANUS, BROUNS DERK SERVATIUS GERTRUDA, VERMEULEN JOHANNES PETRUS MARTINUS BERNARDUS, JANSSEN PAUL, VLES DAVID FERDINAND, ABEGG ERIK ACHILLES, VOORTHUIJZEN WILLEM PIETER, GOVIL PRADEEP K, VAN ZWOL PIETER JAN, BENDIKSEN AAGE, VAN DER ZANDE WILLEM JOAN, NOTENBOOM ARNOUD WILLEM, WILEY JAMES NORMAN
Year of Publication 27.08.2018
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Year of Publication 27.08.2018
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리소그래피 장치를 위한 펠리클 제조 방법, 리소그래피 장치를 위한 펠리클 장치, 리소그래피 장치, 디바이스 제조 방법, 펠리클 처리 장치, 및 펠리클 처리 방법
PETER MARIA, NASALEVICH MAXIM ALEKSANDROVICH, ABEGG ERIK ACHILLES, GIESBERS ADRIANUS JOHANNES MARIA, VLES DAVID FERDINAND, VOORTHUIJZEN WILLEM PIETER, VAN DEN EINDEN WILHELMUS THEODORUS ANTHONIUS JOHANNES, VAN ZWOL PIETER JAN, KLOOTWIJK JOHAN HENDRIK, VAN DER ZANDE WILLEM JOAN, VERMEULEN JOHANNES PETRUS MARTINUS BERNARDUS
Year of Publication 29.06.2018
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Year of Publication 29.06.2018
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EUV 리소그래피를 위한 멤브레인
PETER MARIA, NASALEVICH MAXIM ALEKSANDROVICH, VAN DE KERKHOF MARCUS ADRIANUS, BANERJEE NIRUPAM, ZDRAVKOV ALEXANDAR NIKOLOV, VERBURG ANTONIUS WILLEM, BLAUW MICHIEL ALEXANDER, BROUNS DERK SERVATIUS GERTRUDA, VERMEULEN JOHANNES PETRUS MARTINUS BERNARDUS, LENDERINK EGBERT, NIKIPELOV ANDREY, RISPENS GIJSBERT, JANSSEN PAUL, ABEGG ERIK ACHILLES, VLES DAVID FERDINAND, VOORTHUIJZEN WILLEM PIETER, KRUIZINGA MATTHIAS, VAN ZWOL PIETER JAN, PILIEGO CLAUDIA, VAN DER ZANDE WILLEM JOAN, SCHUH NADJA, MAXIM NICOLAE, NOTENBOOM ARNOUD WILLEM
Year of Publication 20.12.2018
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Year of Publication 20.12.2018
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Pellicle and pellicle assembly
Van Der Zande, Willem Joan, Péter, Mária, Janssen, Paul, Voorthuijzen, Willem-Pieter, Bendiksen, Aage, Vermeulen, Johannes Petrus Martinus Bernardus, Govil, Pradeep K, Abegg, Erik Achilles, Brouns, Derk Servatius Gertruda, Van Zwol, Pieter-Jan, Van De Kerkhof, Marcus Adrianus, Vles, David Ferdinand, Nasalevich, Maxim Aleksandrovich, Wiley, James Norman, Notenboom, Arnoud Willem
Year of Publication 20.08.2024
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Year of Publication 20.08.2024
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Membrane for EUV lithography
Van Der Zande, Willem Joan, Péter, Mária, Blauw, Michiel Alexander, Janssen, Paul, Voorthuijzen, Willem-Pieter, Verburg, Antonius Willem, Vermeulen, Johannes Petrus Martinus Bernardus, Zdravkov, Aleksandar Nikolov, Abegg, Erik Achilles, Brouns, Derk Servatius Gertruda, Maxim, Nicolae, Schuh, Nadja, Nikipelov, Andrey, Van Zwol, Pieter-Jan, Van De Kerkhof, Marcus Adrianus, Kruizinga, Matthias, Lenderink, Egbert, Banerjee, Nirupam, Rispens, Gijsbert, Nasalevich, Maxim Aleksandrovich, Piliego, Claudia, Vles, David Ferdinand, Notenboom, Arnoud Willem
Year of Publication 19.09.2023
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Year of Publication 19.09.2023
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MEMBRANE FOR EUV LITHOGRAPHY
ZDRAVKOV, Aleksandar Nikolov, NIKIPELOV, Andrey, JANSSEN, Paul, Gertruda BROUNS, Derk Servatius, NOTENBOOM, Arnoud Willem, Bernardus VERMEULEN, Johannes Petrus Martinus, PÉTER, Mária, MAXIM, Nicolae, VAN DER ZANDE, Willem Joan, BANERJEE, Nirupam, LENDERINK, Egbert, KRUIZINGA, Matthias, PILIEGO, Claudia, VERBURG, Antonius Willem, ABEGG, Erik Achilles, SCHUH, Nadja, VLES, David Ferdinand, BLAUW, Michiel Alexander, VAN ZWOL, Pieter-Jan, Nasalevich, Maxim Aleksandrovich, VAN DE KERKHOF, Marcus Adrianus, RISPENS, Gijsbert, VOORTHUIJZEN, Willem-Pieter
Year of Publication 04.01.2024
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Year of Publication 04.01.2024
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A MEMBRANE FOR EUV LITHOGRAPHY
VAN DER ZANDE, Willem, Joan, NIKIPELOV, Andrey, VLES, David, Ferdinand, JANSSEN, Paul, NASALEVICH, Maxim, Aleksandrovich, BROUNS, Derk, Servatius, Gertruda, PÉTER, Mária, VERMEULEN, Johannes, Petrus, Martinus, Bernardus, VERBURG, Antonius, Willem, MAXIM, Nicolae, ABEGG, Erik, Achilles, BANERJEE, Nirupam, LENDERINK, Egbert, ZDRAVKOV, Alexandar, Nikolov, KRUIZINGA, Matthias, PILIEGO, Claudia, NOTENBOOM, Arnoud, Willem, SCHUH, Nadja, BLAUW, Michiel, Alexander, VAN ZWOL, Pieter-Jan, VAN DE KERKHOF, Marcus, Adrianus, VOORTHUIJZEN, Willem-Pieter, RISPENS, Gijsbert
Year of Publication 28.06.2023
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Year of Publication 28.06.2023
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A METHOD OF MANUFACTURING A PELLICLE FOR A LITHOGRAPHIC APPARATUS, A PELLICLE FOR A LITHOGRAPHIC APPARATUS, A LITHOGRAPHIC APPARATUS, A DEVICE MANUFACTURING METHOD, AN APPARATUS FOR PROCESSING A PELLICLE, AND A METHOD FOR PROCESSING A PELLICLE
VOORTHUIJZEN, WILLEM-PIETER, ABEGG, ERIK ACHILLES, VAN DER ZANDE, WILLEM JOAN, VERMEULEN, JOHANNES PETRUS MARTINUS BERNARDUS, GIESBERS, ADRIANUS JOHANNES MARIA, VAN DEN EINDEN, WILHELMUS THEODORUS ANTHONIUS JOHANNES, NASALEVICH, MAXIM ALEKSANDROVICH, VAN ZWOL, PIETER-JAN, PETER, MARIA, KLOOTWIJK, JOHAN HENDRIK, VLES, DAVID FERDINAND
Year of Publication 13.12.2022
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Year of Publication 13.12.2022
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A MEMBRANE FOR EUV LITHOGRAPHY
VAN DER ZANDE, Willem, Joan, NIKIPELOV, Andrey, VLES, David, Ferdinand, JANSSEN, Paul, NASALEVICH, Maxim, Aleksandrovich, BROUNS, Derk, Servatius, Gertruda, PÉTER, Mária, VERMEULEN, Johannes, Petrus, Martinus, Bernardus, MAXIM, Nicolae, VERBURG, Antonius, Willem, ABEGG, Erik, Achilles, BANERJEE, Nirupam, LENDERINK, Egbert, ZDRAVKOV, Alexandar, Nikolov, KRUIZINGA, Matthias, PILIEGO, Claudia, NOTENBOOM, Arnoud, Willem, BLAUW, Michiel, Alexander, SCHUH, Nadja, VAN ZWOL, Pieter-Jan, VAN DE KERKHOF, Marcus, Adrianus, RISPENS, Gijsbert, VOORTHUIJZEN, Willem-Pieter
Year of Publication 31.05.2023
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Year of Publication 31.05.2023
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PELLICLE AND PELLICLE ASSEMBLY
JANSSEN, Paul, WILEY, James Norman, NOTENBOOM, Arnoud Willem, GOVIL, Pradeep K, PÉTER, Mária, VAN DER ZANDE, Willem Joan, VOORTHUIJZEN, Willlem-Pieter, NASALEVICH, Maxim Aleksandrovich, VLES, David Ferdinand, ABEGG, Erik Achilles, VAN ZWOL, Pieter-Jan, VERMEULEN, Johannes Petrus Martinus Bernardus, BENDIKSEN, Aage, VAN DE KERKHOF, Marcus Adrianus, BROUNS, Derk Servatius Gertruda
Year of Publication 11.08.2022
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Year of Publication 11.08.2022
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Pellicle and pellicle assembly
Van Der Zande, Willem Joan, Péter, Mária, Janssen, Paul, Voorthuijzen, Willem-Pieter, Bendiksen, Aage, Vermeulen, Johannes Petrus Martinus Bernardus, Govil, Pradeep K, Abegg, Erik Achilles, Brouns, Derk Servatius Gertruda, Van Zwol, Pieter-Jan, Van De Kerkhof, Marcus Adrianus, Vles, David Ferdinand, Nasalevich, Maxim Aleksandrovich, Wiley, James Norman, Notenboom, Arnoud Willem
Year of Publication 31.05.2022
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Year of Publication 31.05.2022
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PELLICLE AND PELLICLE ASSEMBLY
VAN DER ZANDE, Willem, Joan, VLES, David, Ferdinand, JANSSEN, Paul, BROUNS, Derk, Servatius, Gertruda, NASALEVICH, Maxim, Aleksandrovich, GOVIL, Pradeep K, PÉTER, Mária, VERMEULEN, Johannes, Petrus, Martinus, Bernardus, WILEY, James, Norman, ABEGG, Erik, Achilles, NOTENBOOM, Arnoud, Willem, VAN ZWOL, Pieter-Jan, BENDIKSEN, Aage, VAN DE KERKHOF, Marcus, Adrianus, VOORTHUIJZEN, Willem-Pieter
Year of Publication 16.02.2022
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Year of Publication 16.02.2022
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PELLICLE AND PELLICLE ASSEMBLY
JANSSEN, Paul, WILEY, James Norman, NOTENBOOM, Arnoud Willem, GOVIL, Pradeep K, PÉTER, Mária, VAN DER ZANDE, Willem Joan, NASALEVICH, Maxim Aleksandrovich, VLES, David Ferdinand, ABEGG, Erik Achilles, VAN ZWOL, Pieter-Jan, VERMEULEN, Johannes Petrus Martinus Bernardus, BENDIKSEN, Aage, VAN DE KERKHOF, Marcus Adrianus, VOORTHUIJZEN, Willem-Pieter, BROUNS, Derk Servatius Gertruda
Year of Publication 08.07.2021
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Year of Publication 08.07.2021
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Pellicle and pellicle assembly
Van Der Zande, Willem Joan, Péter, Mária, Janssen, Paul, Voorthuijzen, Willem-Pieter, Bendiksen, Aage, Vermeulen, Johannes Petrus Martinus Bernardus, Govil, Pradeep K, Abegg, Erik Achilles, Brouns, Derk Servatius Gertruda, Van Zwol, Pieter-Jan, Van De Kerkhof, Marcus Adrianus, Vles, David Ferdinand, Nasalevich, Maxim Aleksandrovich, Wiley, James Norman, Notenboom, Arnoud Willem
Year of Publication 20.04.2021
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Year of Publication 20.04.2021
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MEMBRANE FOR EUV LITHOGRAPHY
Van Der Zande, Willem Joan, Péter, Mária, Blauw, Michiel Alexander, Janssen, Paul, Voorthuijzen, Willem-Pieter, Verburg, Antonius Willem, Vermeulen, Johannes Petrus Martinus Bernardus, Zdravkov, Aleksandar Nikolov, Abegg, Erik Achilles, Brouns, Derk Servatius Gertruda, Maxim, Nicolae, Schuh, Nadja, Nikipelov, Andrey, Van Zwol, Pieter-Jan, Van De Kerkhof, Marcus Adrianus, Kruizinga, Matthias, Lenderink, Egbert, Banerjee, Nirupam, Rispens, Gijsbert, Nasalevich, Maxim Aleksandrovich, Piliego, Claudia, Vles, David Ferdinand, Notenboom, Arnoud Willem
Year of Publication 15.04.2021
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Year of Publication 15.04.2021
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Membrane for EUV lithography
Van Der Zande, Willem Joan, Péter, Mária, Blauw, Michiel Alexander, Janssen, Paul, Voorthuijzen, Willem-Pieter, Verburg, Antonius Willem, Vermeulen, Johannes Petrus Martinus Bernardus, Zdravkov, Aleksandar Nikolov, Abegg, Erik Achilles, Brouns, Derk Servatius Gertruda, Maxim, Nicolae, Schuh, Nadja, Nikipelov, Andrey, Van Zwol, Pieter-Jan, Van De Kerkhof, Marcus Adrianus, Kruizinga, Matthias, Lenderink, Egbert, Banerjee, Nirupam, Rispens, Gijsbert, Nasalevich, Maxim Aleksandrovich, Piliego, Claudia, Vles, David Ferdinand, Notenboom, Arnoud Willem
Year of Publication 02.02.2021
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Year of Publication 02.02.2021
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PELLICLE AND PELLICLE ASSEMBLY
PIETER-JAN VAN ZWOL, WILLEM JOAN VAN DER ZANDE, PRADEEP GOVIL, DAVID FERDINAND VLES, JAMES NORMAN WILEY, AAGE BENDIKSEN, PAUL JANSSEN, ERIK ACHILLES ABEGG, ARNOUD WILLEM NOTENBOOM, JOHANNES PETRUS MARTINUS BERNARDUS VERMEULEN, DERK SERVATIUS GERTRUDA BROUNS, MAXIM ALEKSANDROVICH NASALEVICH, MARCUS ADRIANUS VAN DE KERKHOF, MÁRIA PÉTER, WILLEM-PIETER VOORTHUIJZEN
Year of Publication 13.08.2020
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Year of Publication 13.08.2020
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PELLICLE AND PELLICLE ASSEMBLY
JANSSEN, Paul, WILEY, James Norman, GOVIL, Pradeep K, PÉTER, Mária, VAN DER ZANDE, Willem Joan, VAN-ZWOL, Pieter-Jan, NOTENBOOM, Arnould Willem, NASALEVICH, Maxim Aleksandrovich, VLES, David Ferdinand, ABEGG, Erik Achilles, VERMEULEN, Johannes Petrus Martinus Bernardus, BENDIKSEN, Aage, VAN DE KERKHOF, Marcus Adrianus, VOORTHUIJZEN, Willem-Pieter, BROUNS, Derk Servatius Gertruda
Year of Publication 27.02.2020
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Year of Publication 27.02.2020
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