Update of Development Progress of the High Power LPP-EUV Light Source Using a Magnetic Field
Kouge, Kouichiro, Nagai, Shinji, Hori, Tsukasa, Ueno, Yoshifumi, Yanagida, Tatsuya, Miyao, Kenichi, Hayashi, Hideyuki, Watanabe, Yukio, Abe, Tamotsu, Nakarai, Hiroaki, Saito, Takashi, Mizoguchi, Hakaru
Published in Journal of Photopolymer Science and Technology (01.07.2020)
Published in Journal of Photopolymer Science and Technology (01.07.2020)
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Journal Article
High Power LPP-EUV Source with Long Collector Mirror Lifetime for Semiconductor High Volume Manufacturing
Mizoguchi, Hakaru, Nakarai, Hiroaki, Abe, Tamotsu, Tanaka, Hiroshi, Watanabe, Yukio, Hori, Tsukasa, Kodama, Takeshi, Shiraishi, Yutaka, Yanagida, Tatsuya, Soumagne, Georg, Yamada, Tsuyoshi, Saitou, Takashi
Published in Journal of Photopolymer Science and Technology (24.06.2019)
Published in Journal of Photopolymer Science and Technology (24.06.2019)
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Journal Article
Filmless versus film-based systems in radiographic examination costs: an activity-based costing method
Muto, Hiroshi, Tani, Yuji, Suzuki, Shigemasa, Yokooka, Yuki, Abe, Tamotsu, Sase, Yuji, Terashita, Takayoshi, Ogasawara, Katsuhiko
Published in BMC health services research (30.09.2011)
Published in BMC health services research (30.09.2011)
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Journal Article
Laser-Produced Plasma Light Source Development for Extreme Ultraviolet Lithography
Komori, Hiroshi, Soumagne, Georg, Abe, Tamotsu, Suganuma, Takashi, Imai, Yousuke, Someya, Hiroshi, Takabayashi, Yuichi, Endo, Akira, Toyoda, Koichi
Published in Japanese Journal of Applied Physics (01.06.2004)
Published in Japanese Journal of Applied Physics (01.06.2004)
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Journal Article
Motion planning by genetic algorithm for a redundant manipulator using a model of criteria of skilled operators
Shibata, Takanori, Abe, Tamotsu, Tanie, Kazuo, Nose, Matsuo
Published in Information sciences (01.11.1997)
Published in Information sciences (01.11.1997)
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Journal Article
Survey on the willingness to pay for tele-health consultation
Suzuki, Teppei, Abe, Tamotsu, Tsuji, Shintaro, Shimoda, Tomoko, Yoshimura, Sadako, Ogasawara, Katsuhiko
Published in Health policy and technology (01.09.2019)
Published in Health policy and technology (01.09.2019)
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Journal Article
Molecular Epidemiological Study of a Mass Outbreak Caused by Enteropathogenic Escherichia coli O157:H45
Makino, Sou-ichi, Asakura, Hiroshi, Shirahata, Toshikazu, Ikeda, Tetsuya, Takeshi, Koichi, Arai, Keisuke, Nagasawa, Motohiro, Abe, Tamotsu, Sadamoto, Terukazu
Published in MICROBIOLOGY and IMMUNOLOGY (01.01.1999)
Published in MICROBIOLOGY and IMMUNOLOGY (01.01.1999)
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Journal Article
Skill based motion planning in hierarchical intelligent control of a redundant manipulator
Shibata, Takanori, Abe, Tamotsu, Tanie, Kazuo, Nose, Matsuo
Published in Robotics and autonomous systems (01.07.1996)
Published in Robotics and autonomous systems (01.07.1996)
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Journal Article
Conference Proceeding
BREAD PACKAGING DEVICE AND BREAD CARRIER SYSTEM
SAKAMOTO SHIGEHISA, HASEGAWA TAKAHIRO, NAKAMURA KEN, FUJITA TASUKU, UMETSU MASAMI, SUZUKI MINORU, ABE TAMOTSU
Year of Publication 14.12.2017
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Year of Publication 14.12.2017
Patent
Performance of 100-W HVM LPP-EUV source
Mizoguchi, Hakaru, Nakarai, Hiroaki, Abe, Tamotsu, Nowak, Krzysztof M., Kawasuji, Yasufumi, Tanaka, Hiroshi, Watanabe, Yukio, Hori, Tsukasa, Kodama, Takeshi, Shiraishi, Yutaka, Yanagida, Tatsuya, Soumagne, Georg, Yamada, Tsuyoshi, Yamazaki, Taku, Okazaki, Shinji, Saitou, Takashi
Published in Advanced optical technologies (01.08.2015)
Published in Advanced optical technologies (01.08.2015)
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Journal Article