Bread conveying apparatus
Umetsu Masami, Abe Tamotsu, Suzuki Minoru, Sakamoto Shigehisa, Hasegawa Takahiro, Nakamura Takeshi, Fujita Tasuku
Year of Publication 15.08.2017
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Year of Publication 15.08.2017
Patent
Development of 250W EUV light source for HVM lithography
Mizoguchi, Hakaru, Nakarai, Hiroaki, Abe, Tamotsu, Nowak, Krzysztof M., Kawasuji, Yasufumi, Tanaka, Hiroshi, Watanabe, Yukio, Hori, Tsukasa, Kodama, Takeshi, Shiraishi, Yutaka, Yanagida, Tatsuya, Yamada, Tsuyoshi, Yamazaki, Taku, Okazaki, Shinji, Saitou, Takashi
Published in 2016 China Semiconductor Technology International Conference (CSTIC) (01.03.2016)
Published in 2016 China Semiconductor Technology International Conference (CSTIC) (01.03.2016)
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Conference Proceeding
Collector mirror exchanging apparatus and method for extreme ultraviolet light source apparatus
SUGANUMA TAKASHI, SOMEYA HIROSHI, SUMITANI AKIRA, ABE TAMOTSU, HOSHINO HIDEO
Year of Publication 12.08.2014
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Year of Publication 12.08.2014
Patent
METHOD AND APPARATUS FOR CLEANING COLLECTOR MIRROR IN EUV LIGHT GENERATOR
ASAYAMA TAKESHI, SOMEYA HIROSHI, MORIYA MASATO, HOSHINO HIDEO, ABE TAMOTSU
Year of Publication 19.06.2014
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Year of Publication 19.06.2014
Patent
Extreme ultraviolet light generation apparatus
ISHIHARA TAKANOBU, WAKABAYASHI OSAMU, YABU TAKAYUKI, KAKIZAKI KOUJI, ABE TAMOTSU
Year of Publication 15.04.2014
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Year of Publication 15.04.2014
Patent