BREAD TURNOVER DEVICE AND BREAD CONVEYANCE SYSTEM
HASEGAWA TAKAHIRO, SAITO MASANORI, SUZUKI NOBUHIRO, TANAKA HIROYUKI, SUGIYAMA KAZUYA, ABE TAMOTSU
Year of Publication 24.12.2015
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Year of Publication 24.12.2015
Patent
High power LPP-EUV source with long collector mirror lifetime for high volume semiconductor manufacturing
Mizoguchi, Hakaru, Nakarai, Hiroaki, Abe, Tamotsu, Nowak, Krzysztof M, Kawasuji, Yasufumi, Tanaka, Hiroshi, Watanabe, Yukio, Hori, Tsukasa, Kodama, Takeshi, Shiraishi, Yutaka, Yanagida, Tatsuya, Soumagne, Georg, Yamada, Tsuyoshi, Yamazaki, Taku, Saitou, Takashi
Published in 2018 China Semiconductor Technology International Conference (CSTIC) (01.03.2018)
Published in 2018 China Semiconductor Technology International Conference (CSTIC) (01.03.2018)
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Conference Proceeding